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Chem 2 thickness nu - PowerPoint PPT Presentation

Scale-Up Activities in Atomic Layer Deposition at Argonne

Scale-Up Activities in Atomic Layer Deposition at Argonne. Jeffrey Elam, Anil Mane, Joe Libera December 9, 2011. Large Area Picosecond Photodetector Collaboration Meeting December 9-10, 2011, Argonne National Laboratory. Outline. Introduction to ALD (1 slide) ALD on 33mm plates

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Chem 2 thickness nu - PowerPoint PPT Presentation

Scale-Up Activities in Atomic Layer Deposition at Argonne