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Actuator array - PowerPoint PPT Presentation

TO STUDY THE DEFLECTION OF MEMS ETM ACTUATOR BY USING 20-Sim

TO STUDY THE DEFLECTION OF MEMS ETM ACTUATOR BY USING 20-Sim. - CHANDRASEKHARAN SRINIVASAN. Introduction Electro-Thermo-Mechanical Actuators FEA Analysis 20-Sim model of an actuator Actuator array Simulation results Validation. INTRODUCTION.

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461 views • 26 slides

A high force low area MEMS thermal actuator

A high force low area MEMS thermal actuator. 2004.10.9 ???. Abstract. This paper presents a new type of mems(micro-electro-mechanical systems)actuator consisting of an array of in-plane micro-fabricated thermal buckle-beam actuators

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465 views • 17 slides

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Actuator array - PowerPoint PPT Presentation

TO STUDY THE DEFLECTION OF MEMS ETM ACTUATOR BY USING 20-Sim

A high force low area MEMS thermal actuator