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4 wafer - PowerPoint PPT Presentation

p.1005

p.1005. Fig 32-CO, p.1003. 20nm Au/20 nm Ti. 20nm Au/20 nm Ti. 65 ? m. Cu. Cu. Cu. 140nm Cu/40 nm Ti. 65 ? m. Cu. Cu. Cu. 140nm Cu/40 nm Ti. NiZnCu ferrite. Si. 300 nm thick SiO 2. Si. 20nm Au/20 nm Ti. Miniature air-core and magnetic inductors (5 mm x 5 mm). Air-core inductor.

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4 wafer - PowerPoint PPT Presentation

p.1005