3d pixel detectors - PowerPoint PPT Presentation

Development of New 3d Si Detectors at BNL and CNM *

Development of New 3d Si Detectors at BNL and CNM *. Z. Li 1 , W. Chen 1 , Y.H. Guo 1 , D. Lissauer 1 , D. Lynn 1 , V. Radeka 1 , M. Lozano 2 , G. Pellegrini 2 1 Brookhaven National Laboratory, Upton, NY 11973-5000, USA

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Status of 3D detector productions at CNM

Status of 3D detector productions at CNM. Giulio Pellegrini Instituto de Microelectrónica de Barcelona, IMB-CNM-CSIC, Barcelona, Spain. Hole aspect ratio 25:1 10µm diameter, 250µm deep P- and N-type substrates, 285µm thick. Double-sided 3D at CNM.

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173 views • 14 slides

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