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Laboratory Demo: Metal Evaporation

Learn how to perform metal evaporation in a laboratory setting to deposit thin films on wafers. Follow steps to clean, dry, install metal, set up equipment, and measure film thickness.

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Laboratory Demo: Metal Evaporation

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  1. Laboratory Demo: Metal Evaporation

  2. - Open evaporator.

  3. - Remove wafer holder.

  4. - This is where the wafers will be during the evaporation process.

  5. - Remove the bell jar.

  6. - Prepare metal: e. g., use metal wire.

  7. - The metal will be placed in a "basket".

  8. - Some evaporators use a "coil" instead of a "basket".

  9. - Both metal and basket/coil should be cleaned.

  10. - They should then be dried in the dehydration oven.

  11. - The basket/coil should be installed between the two electrodes, and the metal placed inside the basket or around the coil.

  12. - Move shutter to cover the filament.

  13. - Put on the bell jar.

  14. - Carefully load the wafers onto the wafer holder.

  15. - One of the wafers may be a "test" wafer for measuring the metal layer thickness.

  16. - Replace the wafer holder back on top of the bell jar.

  17. - Place the cover back onto the bell jar.

  18. - Lower pressure ( ~ 10-6 Torr ).

  19. - Heat the filament to evaporate the metal.

  20. - Cool and remove wafers.

  21. - The test wafer allows measurement of film thickness.

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