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6-10: pitch 100 µm

10. 9. 8. 7. 6. 5. 4. 3. 2. 1. Microstrip detectors. 1-5: pitch 50 µm. Detector ID numbers. 6-10: pitch 100 µm. Die dimension: 5.92 mm x 47.36 mm. Microstrip detectors characteristics. 1-5: pitch 50 µm. 6-10: pitch 100 µm. Capacitance Test. Right. Left. L. 1. 2. 3. 4. 5.

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6-10: pitch 100 µm

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  1. 10 9 8 7 6 5 4 3 2 1 Microstrip detectors 1-5: pitch 50 µm DetectorID numbers 6-10: pitch 100 µm Die dimension: 5.92 mm x 47.36 mm

  2. Microstrip detectors characteristics 1-5: pitch 50 µm 6-10: pitch 100 µm

  3. Capacitance Test Right Left

  4. L 1 2 3 4 5 6 7 8 9 10 R (Delivery to SCIPP 05.05.2005) • SMART1 (p+/n): • W176 (MCz, sintering@380C, no passivation, 300µm) • W1256 (FZ, sintering@380C, no passivation , 300µm) • SMART2 (n+/p): • W260 (MCz, sintering@380C, no passivation, 300µm, p-spray 5e12, cut-line not implanted) • W068 (FZ, sintering@380C, passivated, 200µm, p-spray 5e12, cut-line not implanted) Capacitance test left Microstrip minisensors Capacitance test right

  5. wafer # sub-type comments 1 FZ 525 no OG; P-spray 3E12 2 FZ 525 P-spray 3E12 3 FZ 525 P-spray 3E12 + no scribe line implant 4 FZ 525 P-spray 5E12 5 FZ 525 P-spray 5E12 6 FZ 525 no OG; P-spray 5E12 + no scribe line implant 6 wafers 008 FZ 200 P-spray 3E12 014 FZ 200 P-spray 3E12 024 FZ 200 no OG; P-spray 3E12 + no scribe line implant 037 FZ 200 P-spray 5E12 064 FZ 200 P-spray 5E12 068 FZ 200 P-spray 5E12 + no scribe line implant 084 (broken) FZ 200 no OG; P-spray 5E12 + no scribe line implant 7 wafers 009 MCz no OG; P-spray 3E12 044 MCz no OG; P-spray 3E12 066 MCz no OG; P-spray 3E12 102 MCz no OG; P-spray 3E12 + no scribe line implant 108 MCz no OG; P-spray 3E12 + no scribe line implant 122 MCz no OG; P-spray 3E12 + no scribe line implant 130 MCz no OG; P-spray 5E12 182 MCz no OG; P-spray 5E12 248 MCz no OG; P-spray 5E12 + no scribe line implant 253 MCz no OG; P-spray 5E12 + no scribe line implant 260 MCz no OG; P-spray 5E12 + no scribe line implant 11 wafers 24 wafers SMART2 n+/p:sub-types & splittings

  6. SMART2 - n+/p - IV measurements on microstrip minisensors (Vmax=200V) 3 & 5: pitch 50 µm 8 & 10: pitch 100 µm 5 8 10 3

  7. SMART2 - n+/p - FZ 200 W014: Low dose p-spray Pitch: 50mm Short BL-GR Pitch: 100mm

  8. SMART2 - n+/p - FZ 200 W037: High dose p-spray Pitch: 50mm Pitch: 100mm

  9. SMART2 - n+/p - MCz 300 W066: Low dose p-spray Pitch: 50mm Pitch: 100mm Wrong cut

  10. SMART2 - n+/p - MCz 300 W182: High dose p-spray Pitch: 50mm Pitch: 100mm Wrong cut

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