LANGMUIR PROBES IN THE INTENSE RF ENVIRONMENT INSIDE A HELICON DISCHARGE. Francis F. Chen, UCLA. Gaseous Electronics Conference, Austin TX, Tuesday, October 23, 2012. UCLA. The permanent-magnet helicon source. The discharge tube is 5 cm in diam and 5 cm high. UCLA. The Langmuir probe.
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LANGMUIR PROBES IN THE INTENSE RF ENVIRONMENT INSIDE A HELICON DISCHARGE
Francis F. Chen, UCLA
Gaseous Electronics Conference, Austin TX, Tuesday, October 23, 2012
The discharge tube is 5 cm in diam and 5 cm high
Compensation Electrode (CE)
Electron current is greatly distorted.
This is new: residence time at cos(wt) ~ 0 is taken into account.
Saturation ion current is not affected.
This gives Te and VS after subtracting ion current fit
This gives n without knowing Te
Electron distribution functions cannot be trusted.
T1 = 8.22 eV
T2 = 4.65 eV
T3 = 2.97 eV
Density scan along axis
Pressure scan of n and Te
Power scan at center of discharge
Power scan 17 cm below discharge
Same data, w. Vmax=70 point
Emission adds to ion current in subsequent pulses
SA = 4 here