1 / 5

Micro Electro Mechanical Systems

Micro Electro Mechanical Systems. MEMS By Seth Austin. Materials and Fabrication. Silicon is the dominate material used Excellent electrical and mechanical properties For High Temp. applications, SiC is ideal Other alternatives include TiNi (shape memory alloys). Applications.

riona
Download Presentation

Micro Electro Mechanical Systems

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Micro Electro Mechanical Systems MEMS By Seth Austin

  2. Materials and Fabrication • Silicon is the dominate material used • Excellent electrical and mechanical properties • For High Temp. applications, SiC is ideal • Other alternatives include TiNi (shape memory alloys)

  3. Applications • Both Military and commercial use • Automobiles • Airplanes • Home Appliances

  4. World Market • Overwhelming commercial demand • Drastic Increase in World-wide Sales

  5. References • Mehregany, M./ Roy, S. “Microengineering Aerospace Systems.” MEMS Market, www.aero.org/publications/aeropress/Helvajian/Helvajian_1_4.html, 10 Feb. 2004 • “MRS tackle MEMS materials issues” 10 April 2002, www.thinfilmmfg.com/subscribers/Subscriber02/mems10Apr02.htm, 10 Feb. 2004 • Bang, Chris. “EETimes.” Electrochemical method simplifies MEMS fabrification. 18 March 2002, www.eetimes.com/in_focus/communications/OEG20020315S0052, 10 Feb. 2004 • Jakubczak, Jay. “Vision for MEMS.” Micromachines. www.sandia.gov/mstc/technologies/micromachines/vision.html, 10 Feb. 2004.

More Related