Nanotechnology Cleanroom Design Considerations

1. Nanotechnology Cleanroom Design Considerations • Scott Mackler • Tim Loughran Weizmann Institute of Science

2. Outline • How to Define the User Requirements? • Basic Contaminate Control • Design Concepts? • Case Studies? • Outline Requirements? First- Tell us about your level of expertise and understanding. Weizmann Institute of Science

3. What is Nanotechnology? • Research and technology development at the atomic, molecular or macromolecular levels • Ability to control or manipulate on the atomic scale • Creating and using structures, devices and systems that have novel properties due to their small and/or intermediate sizes Weizmann Institute of Science

4. Size of Nanometer • 1 Nanometer = One-Billionth of a Meter • Nanometer sized particles are smaller than a living cell and can be seen only with the most powerful microscopes • Width of human hair is approx. 80,000 nanometers • The average human can see in the 80,000 nanometer range • One small dust particle seen in a ray of sun equates to approx. 60,000 nanometers • DNA is in the 2.5 nanometer range Weizmann Institute of Science

5. The Scale of Things Weizmann Institute of Science

6. Nanotechnology Applications • Creation of new materials w/ superior strength, electrical conductivity, resistance to heat and other properties • Microscopic machines, including probes that could be injected into the body for medical diagnosis and repair • Creation of “bio-chips” that detect food-borne contamination, dangerous substances in the blood or chemical warfare agents in the air Weizmann Institute of Science

7. Defining a Cleanroom • Designed, built, and operated to provide cleanliness, control, and/or isolation • Built with smooth, hard, cleanable surfaces • Air filtration system is critical – HEPA filters (High Efficiency Particulate Air) • Strict procedures control operation, personnel, process and materials Weizmann Institute of Science

8. Why have a Cleanroom? • To protect the product or process from contamination • To restrict access to the product or process • To contain hazards located within the cleanroom Weizmann Institute of Science

9. What is Contamination? • Contamination is anything (material, substance, or energy) which corrupts the process or makes the product impure by either touching or mixing with it • Solid / Liquid / Gas • Organic / Non-Organic • Airborne / Surface • Chemical Makeup • Size and Shape • Static Charge + / - Weizmann Institute of Science

10. How is Cleanroom Contamination Measured? • Measured in microns or micrometers • 1 micron = One millionth of a meter • There are 25,400 microns in an inch • A human hair is approx. 75 microns in diameter • Human eye can see particles down to about 50 microns • Bacteria is approx. 2 to 10 microns in size Weizmann Institute of Science

11. How is Cleanroom Contamination Measured? • Cleanrooms are measured in the amount of ½ micron size particles in one cubic foot of sampled air. (½ micron particle = .00001968”) Weizmann Institute of Science

12. What Creates Contamination? • Personnel activity within the cleanroom generates and transports contamination • Moving • Talking • Breathing • Scratching • Sneezing Weizmann Institute of Science

13. What Creates Contamination? People Contaminate! Weizmann Institute of Science

14. What Creates Contamination? • People generate contamination • Skin flakes and oil • Spittle (smokers especially) • Hair • Perspiration • Clothing debris (lint, fibers, etc.) Weizmann Institute of Science

15. What Creates Contamination? • Materials generate contamination • Wood products • Construction materials (drywall, concrete dust, etc.) • Pencils • Duct tape • Cardboard and paper • Paint and coatings Weizmann Institute of Science

16. What Creates Contamination? • Equipment generates contamination • Electric motors • Scaffolds • Ladders • Gang boxes • Brooms, mops and dusters Weizmann Institute of Science

17. What are Cleanroom Classifications? • All cleanrooms are not built or operated to the same cleanliness standard due to the size of the devices that are being built or handled at each customers location. • ISO 14644-1, which replaces Federal Standard 209E, is the basis of Cleanroom Classification. • ISO 14644 classifies a Cleanroom based on the size and number of airborne particles Weizmann Institute of Science

18. What are Cleanroom Classifications? Chart of ISO-14644 & FED-STD-209E classifications Weizmann Institute of Science

19. Clean-Build Goals and Methods • Minimize and remove contaminants from the environment • Don’t allow contaminate into the cleanroom • Control behaviors in the clean room • Continual clean-up and removal of debris • Vacuuming, wet mopping, wipe downs Weizmann Institute of Science

20. Clean-Build Goals and Methods • Neutralize the threat within the environment • Grounding (Electro-Static Discharge control) • Safety • Immediate spill cleanup Weizmann Institute of Science

21. Case Studies • Purdue University- Birck Nanotechnology Center • Brookhaven National Laboratory (BNL)- Center for Functional Nanomaterials • University of North Carolina and North Carolina AT&T- Joint School of Nanoscience and Nanoengineering (JSNN) • Iberian National Laboratory (INL)- Brage Portugal Weizmann Institute of Science

22. Purdue University Weizmann Institute of Science

23. Purdue Birck Nanotechnology Center Weizmann Institute of Science

24. Purdue Birck Nanotechnology Center Cleanroom Floor Plan Weizmann Institute of Science

25. Brookhaven National Laboratories Weizmann Institute of Science

26. BNL Center for Functional Nanomaterials Cleanroom Weizmann Institute of Science

27. BNL Center for Functional Nanomaterials Cleanroom Floor Plan Weizmann Institute of Science

28. UNC and NC A&T Weizmann Institute of Science

29. UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom Weizmann Institute of Science

30. UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom Weizmann Institute of Science

31. Iberian National Laboratory Weizmann Institute of Science

32. Iberian National Laboratory (INL)Cleanroom Weizmann Institute of Science

33. Iberian National Laboratory (INL) Cleanroom Weizmann Institute of Science

34. Define Requirements • Functions/Processes • Control Parameters • Type of Room- Bay Chase vs. Ballroom • Type of Systems- Air Delivery • Vibration Criteria • EMI Requirements • Nano Bio Functions and Interface Weizmann Institute of Science

35. Define Requirements Functional Processes: • Wet Process/Etch • Dry Etch • Photolithography • Thermal • Deposition • MBE • Inspection • Characterization • Nano Bio Weizmann Institute of Science

36. Define Requirements Control Parameters: • ISO Class • Temperature/RH • Process Services • Exhaust Streams Weizmann Institute of Science

37. Define Requirements Type of Rooms: • Bay/Chase • Ballroom Weizmann Institute of Science

38. Define Requirements Type of Systems- Air Delivery: • Fan Filters • Duct Supply/Open Return • Ducted Supply/Ducted Return • Make Up Air Introduction Weizmann Institute of Science

39. Define Requirements Vibration Criteria: • Equipment Requirements • Location within building • Adjacent spaces • Parameters (Millimeters per Second): • 125 MPS Areas • 200 to 500 MPS Areas • Over 500 MPS Areas Weizmann Institute of Science

40. Define Requirements EMI Requirements: • Equipment Requirements • Fields AC and/or DC (milliGAUSS) • 0.1 mG peak-to-peak Weizmann Institute of Science

41. Define Requirements Nano Bio Functions • What is different? • How does it interface with the function fab? Weizmann Institute of Science

42. Conclusion Questions Stated Design Parameters Weizmann Institute of Science