1 / 3

ALD Introduction

Numerical Characterization of Gas Flow in Atomic Layer Deposition (ALD) Vacuum Reactor: a Comparative Study of Lattice Boltzmann Models Dongqing Pan*(dpan@uwm.edu); Chris Yuan. Department of Mechanical Engineering, University of Wisconsin, Milwaukee. ALD Introduction. Objectives.

olaf
Download Presentation

ALD Introduction

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Numerical Characterization of Gas Flow in Atomic Layer Deposition (ALD) Vacuum Reactor: a Comparative Study of Lattice Boltzmann Models Dongqing Pan*(dpan@uwm.edu); Chris Yuan. Department of Mechanical Engineering, University of Wisconsin, Milwaukee ALD Introduction Objectives ALD Experimental System ALDchallenges • Low material utilization efficiency; • High energy consumption; • Nano-wastes and emissions. • Ultimate objectives: • Mathematical modeling and experimental investigations of ALD process emissions. • Thermodynamic flows and energy modeling of ALD nano-manufacturing system. • Sustainable scale-up of ALD nanotechnology for industrial productions. • Objective of this stage: • Mathematical modeling the material flow in ALD manufacturing processes to identify the flow pattern and potential environmental emissions from ALD system.

  2. Methodology & Implementation Two-dimensional geometry of ALD vacuum reactor CFD models comparison • Lattice Boltzmann Model: Collision step: Streaming step: • LBM features: • A mesoscopic method without holding continuum hypothesis; • Easier to implement numerically; • Suitable for the parallel computing and high performance computing; • Accurate flow modeling.

  3. Results & conclusions Computational efficiency: D2Q9 vs. TRT for incompressible flow simulations. Verification of LBM-TRT model Financial support from National Science Foundation (CMMI-1200940) is greatly acknowledged. Acknowledgement Conclusions • The carrier gas flows in the Atomic Layer Deposition (ALD) process is firstly modeled numerically using two LatticeBoltzmann Models: TRT and LBGK-D2Q9; • TRT performs better in terms of stability and reliability, especially when considering the compressible effects in the domain, while LBGK-D2Q9 is excellent in computational efficiency. • The results generated from LBM-TRT simulation present good agreement with the two continuum-based approaches. Dimensionless velocity magnitude contour plots by D2Q9. From (a), (b) to (c): relaxation factor=1.95,1.97, 1.99. Dimensionless velocity magnitude contour plots by TRT. From (a), (b) to (c): relaxation factor=1.95,1.97, 1.99.

More Related