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Sensor Design Lab.

Sensor Design Lab. Andong National University http://eee.andong.ac.kr/sensor/ ytlee@andong.ac.kr +82-54-820-5744. Clean room 1. Wire bonder. Oven. Vision system. Slitter. Chemical dispenser. Vacuum oven. Clean room 1 의 사양 : 면적 30m 2 , class 10,000

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Sensor Design Lab.

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  1. Sensor Design Lab. Andong National University http://eee.andong.ac.kr/sensor/ ytlee@andong.ac.kr +82-54-820-5744

  2. Clean room 1 Wire bonder Oven Vision system Slitter Chemical dispenser Vacuum oven • Clean room 1의사양: 면적 30m2, class 10,000 • Clean room 1은 plastic 및 paper를 재료로 사용하는 센서 개발을 위한 장비 배치 • 혈당 바이오센서 등 바이오센서 스트립 개발 • 혈당 바이오센서 성능 분석 • Plastic 및 paper를 이용한 필름 형 센서 개발 • Imprinting 공정을 이용한 플라스틱 구조물 및 패턴 개발 • 공정종류: Chemical dispensing, plastic film laminating, slit, oven, vision inspection, • wire bonding, biosensor test, imprinting

  3. Clean room 2 Furnace Sputter Plasma system Spinner Aligner • Clean room 2의사양: class 10,000 • Clean room 2는 실리콘 및 금속을 재료로 사용하는 센서 개발 • 압력센서, 적외선 센서 등 개발 • SU-8을 이용하여 P은구조물제작용 mold 개발 • Imprinting 또는 injection용 실리콘 mold 개발 • 공정 종류: Photolithography, sputtering, silicon oxidation, electroplating, silicon wet oxidation, glass drilling, O2 plasma Electro-plating system

  4. 실험실(703) Hood Thermo-hygrostat Electro-spinning Clean bench YSI2300 Pure water plants Centrifuge Injection system • 실험실(703)은각종 실험의 전 처리 및 후 처리, 측정 실시 • Chemical solution 제조, 각종 센서 측정 • 공정 종류: Electro-spinning(PVA nano-web fabrication), injection, sputtering, • hematocrit 측정, 원심 분리, glucose concentration 측정, clean bench, • hood, 용액 필터링, 전자저울, probestation, 초 순수제조

  5. 혈액 분석 장비 - 실험실(703) Hematocrit value 측정 (한일, HA200) Centrifuge(한일, Fleta5) 정밀 전자 저울 (Ohaus, AR0640) Glucose concentration 측정 (YSI2300)

  6. 플라스틱 및 종이 센서 개발 장비 – clean room 1 Vacuum oven Laminating system Dispenser WPG100 (Potentiostat/galvanostat) Slitter Desiccator

  7. 플라스틱 및 종이 센서 개발 장비 – clean room 1 Wire bonder 대형 oven Imprinting system Vision system Microscope

  8. 플라스틱 및 종이 센서 개발 장비 – 실험실(703) Probe station Electro-spinning system Sputter Injection system

  9. 플라스틱 및 종이 센서 개발 장비 – 실험실(703) Thermostat Thermo-hygrostat Hood Clean bench

  10. Sensor & Material 개발 장비 – clean room 2 Spinner, hot-plate, microscope Furnace Aligner Sputter

  11. Sensor & Material 개발 장비 – clean room 2 O2 plasma system Glass drilling system Silicon wet etching system Electro-plating system

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