Development of the filmforming materials. Interference optics coatings

1. Development of the filmforming materials.Interference optics coatings STCU-NATO Workshop From Science to Business October 11-12, 2006 Kyiv Prof. Viktor F. Zinchenko Telephone (+380482)618225 E-mail vfzinchenko@ukr.net A.V. Bogatsky Physical & Chemical Instituteof the National Academy of Sciences of Ukraine Odessa

2. Talk outline What is needed in the market? Brief technology description. Stage of development. Who needs it & how many will they need? What is my unique technology advantage? Competitive matrix. How will I beat the competition? Opportunity for joint work.

3. Proprietary information statement • The technology material presented in this talk is available for licensing or joint product development. • None of the slides contain any confidential or proprietary information which would prevent patenting the technology.

4. Problem Description & Market Need Interference optics of modern laser technique, in particular, of excimer and technological lasers, is based on the use of traditional nomenclature of filmforming materials. The fluorides of rare-earth metals as materials with a high refractive index while the fluorides of alkaline and alkaline-earth metals as materials with a low refractive index for excimer lasers are used . The fundamental problems of creating such filmforming materials are: • influence of the negligible impurities on optical transparency of materialinsufficient stability of the optical and technological parameters of these materials • insufficient level of the manufacturability of these materials. For the most part these problems are connected with the influence of structural imperfection, additions of chemically bounded oxygen and deviation of composition from the given stoichiometry on optical and operational properties both of materials themselves and coatings on their base.

5. Brief technology description The creation of novel filmforming materials is carried out on the basis of the concept, developed by us, of adjustable stabilisation of valence state of metal due to donor-acceptor interaction between components - binary compounds. Valence state is stabilised both during synthesis of the filmforming material, and during its thermal evaporation in deep vacuum. It makes possible receiving coatings with a high degree of perfection - both chemical, and structural. In turn, it positively reveals both in optical (refractive index, factors of scattering and absorption, width of range of an optical transparency) and operational (mechanical and beam durability, stability to a damp atmosphere etc.) properties of coatings received from the materials.

6. Innovative Aspects and Main Advantages Proposed film-forming materials as to their optical losses (less than 0.01%) in the coatings are competitive with the widely used ones, namely thorium fluoride (ThF4). However, proposed materials are higher compared to ThF4 in mechanical durability (0 group), as well as they have no radio-activity.

7. Experimentalresults Filmforming materials on the base of complex fluorides of s-metals and lanthanides, in particular systems MgF2-LnF3 and LnF3-Ln'F3, for interference optical coatings with a low refractive index are developed. The materials are obtained through the fluoridation of metal oxides with the further melting in an inert atmosphere. The essential increase in reliability in operation and simplification of technology of modelling of interference coatings for laser optics, spectral divisors, optical filters and other products is the result of use of these materials. Experimental samples of film- forming material on the base of MgF2 – LuF3 composite

8. Stage of development • Prototype is available for testing • License agreements and cooperation for further development are sought Experimental specimens of the optical elements for the IR spectrum divisor with the multilayered coatings on the base of MgF2 – LuF3 and ZnS – GdS composites (CDO “Arsenal”)

9. Targeted Market Segment • Massachusetts Institute of Technology (USA) • IBM Storage Systems Group (USA) • International SEMATECH (USA) • Intel (USA) • SVG Lithography (USA) • Edmund Scientific Company (USA) • Lawrence Livermore National Laboratory (USA) • Parsons (Great Britain) • Leybold Optics GmbH (Germany) • State Optical Institute (Russia) • State Institute for Applied Optics (Russia) • Scientific-Technological Laser Centre (Russia) • Ural Optical-Mechanical Factory (Russia) • CDO Arsenal (Ukraine)

10. Competition • Ceram (USA) • Umicore (Germany) • Experimental Plant of the Institute of General and Inorganic Chemistry (Russia) • STC Institute for Single Crystals (Ukraine) • JV New Materials & Technologies (Ukraine - USA) Our materials have a significantly higher level of optical and operational parameters compared with traditional ones.

11. Competitive Matrix

12. Opportunities Filmforming materials have wide applications in several industrial sectors: • optical industry • optoelectronics New more effective materials were developed for interference optics of technological and eximer lasers used in: • mechanical engineering • lithography • medicine We are looking for cooperation with Leybold Optics GmbH in the field of Optical Coating Technologies. We are ready to offer technologies of filmforming materials for interference optics.

13. Contact information Prof. Viktor F. Zinchenko Telephone (+380482)618225 E-mail vfzinchenko@ukr.net A.V. Bogatsky Physical & Chemical Instituteof the National Academy of Sciences of Ukraine Odessa