Midterm Project. 授課老師：劉承賢 老師 Student : G923795 蘇家興. Abstract. Piezoresistive Effect Design of Piezoresistive Pressure Sensor Parameters of Commercial Product. Piezoresistive Effect. Variation of resistance caused by stress (1)
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Midterm Project 授課老師：劉承賢 老師 • Student : G923795 蘇家興
Abstract Piezoresistive Effect Design of Piezoresistive Pressure Sensor Parameters of Commercial Product
Piezoresistive Effect • Variation of resistance caused by stress (1) • Piezoresistance matrix for (1 0 0) crystal (2)
Piezoresistive Effect • Change in resistance (3) (for diffused resistors with longitudinal stress and transverse stress) • Piezoresistive Coefficient (4)
From the equation (2)(3)(4) , the resistance equation(5) of <1 0 0> piezoresistor Piezoresistive Effect
Design of Piezoresistive Pressure Sensor • Piezoresisitive Sensor • Bulk Piezoresistive Sensor • Commercially useful • Surface Mounted Piezoresistive Sensor • Experimental
Design of Piezoresistive Pressure Sensor • Bulk Piezoresistive Pressure Sensor • A thin monocrystaline silicon membrane • Silicon diaphragm • Substrate • Elastic material
Design of Piezoresistive Pressure Sensor • Differential Voltage Output of Pressure Sensor (6) • Sensitivity of pressure sensor (7)
Design of Piezoresistive Pressure Sensor • Operation Parameters of Pressure sensor
Parameter Size of the membrane 1500*1500*100 um (L*W*H) Size of the piezoresistor 350*5*1 um Spacing between the piezoresistor and the silicon edge 50 um Design of Piezoresistive Pressure Sensor • Parameters of Membrane
Parameters of Commercial Product 1kPa=0.145Psi
Reference • Ranjit Singh, Low Lee Ngo, Ho Soon Seng, Frederick Neo Chwee Mok.A Silicon Piezoresistive Pressure Sensor.IEEE(2002). • William P. Eaton, James H. Smith, David J. Monk, Gary O’Brien, and Todd F. Miller. Comparison of Bulk- and Surface- Micromachined Pressure Sensors. Micromachined Devices and Components, Proc SPIE, Vol 3514, p. 431.
Reference • Motorola Semiconductors H.K. Ltd.; Silicon Harbour Center, No. 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. • http://www.allsensors.com • http://www.amsys.info