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Mirror Surface - PowerPoint PPT Presentation


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Mirror Surface. Hinges. This SEM picture shows a flip-up mirror. Mirror surface is about 300 m M x150 m M microns area. It has 12 hinges and the whole structure is on a Poly-0 ground plane.

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slide1

Mirror

Surface

Hinges

This SEM picture shows a flip-up mirror. Mirror surface is about 300mM x150mM microns area. It has 12 hinges and the whole structure is on a Poly-0 ground plane.

Notice each hinge has a metal over-lay. Each hinge structure has minimum dimensions. When the mirror is perpendicular to the chip surface, the bottom edge of the active area of mirror will be about 20mM above the chip surface.

Create a layout using MEMSCAP Poly-MUMPS technology.

Problem 1/2

slide2

This SEM picture shows a special hinge called Scissor Hinge. Both the left hand side structure as well as the RHS structure is capable of lifting up. Based on the SEM marker bar you can guess the dimensions. One of the features you see in this SEM is a dimple.

Create a layout using MEMSCAP Poly-MUMPS technology.

Problem 2/2