slide1 l.
Download
Skip this Video
Loading SlideShow in 5 Seconds..
Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory PowerPoint Presentation
Download Presentation
Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

Loading in 2 Seconds...

play fullscreen
1 / 20

Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory - PowerPoint PPT Presentation


  • 178 Views
  • Uploaded on

Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory. Issues and Trends in Clean Technologies. From Traditional Cleanrooms to Minienvironments and Nano-technology Facilities Tengfang (Tim) Xu, Ph.D., PE

loader
I am the owner, or an agent authorized to act on behalf of the owner, of the copyrighted work described.
capcha
Download Presentation

PowerPoint Slideshow about 'Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory' - gavivi


An Image/Link below is provided (as is) to download presentation

Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.


- - - - - - - - - - - - - - - - - - - - - - - - - - E N D - - - - - - - - - - - - - - - - - - - - - - - - - -
Presentation Transcript
slide1

Clean Technologies for Controlled Environment

Tengfang (Tim) Xu, Ph.D., PE

Lawrence Berkeley National Laboratory

issues and trends in clean technologies

Issues and Trends in Clean Technologies

From Traditional Cleanrooms to Minienvironments and Nano-technology Facilities

Tengfang (Tim) Xu, Ph.D., PE

Environmental Energy Technologies Division

Lawrence Berkeley National Laboratory

May 17, 2005

outline
Outline
  • Introduction to clean technologies
    • Cleanrooms and minienvironments
  • Energy saving opportunities
  • Case studies
  • Issues and trends
  • What’s coming?
introduction cleanroom
Introduction: Cleanroom
  • Definition
    • A Cleanroom is "a room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the room and in which other relevant parameters, e.g., temperature, humidity, and pressure, are controlled as necessary."
    • ISO Standard 14644-1
introduction cleanroom5
Introduction: Cleanroom
  • Design
    • The design of cleanroom HVAC systems requires the unique understanding of cleanliness requirements, guidelines, airflow, filtration, room pressurization, code requirements, specialty equipment, precise control, and many more details.
    • IEST CC RP12.2 Considerations in Cleanroom Design
      • Subgroup 1: Cleanroom Design Considerations
      • Subgroup 2: Installation of Cleanroom Production Equipment
      • Subgroup 3: Cleanroom Electrical Systems
introduction minienvironment
Introduction: Minienvironment
  • Definition
    • A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment
  • Guidelines
    • Separative Devices, ISO Standard 14644-7 (IEST)
    • IEST CC RP28.1: Minienvironments
minienvironment applications
Minienvironment Applications
  • A variety of names
    • “Separative devices,” “separative enclosures,” “isolators,” or “barriers” in the microelectronics, chemical, and pharmaceutical industries
    • “Safety cabinets” in biomedical and healthcare
    • “Gloveboxes” in research and defense industry
clean technologies for controlled environment
Clean Technologies for Controlled Environment
  • Process-driven
    • contamination
  • Planning
  • Design
  • Qualifications
  • Operation
cleanroom electric power
Cleanroom Electric Power

Cleanroom Measured Power

energy savings opportunities
Energy Savings Opportunities
  • Efficient Air Systems
    • initial costs
    • optimized sizing
    • utility costs and productivity
    • non-energy benefits
  • Energy efficient planning and design –
    • strategy to achieve cost savings and to improve bottom lines in the industry
results
Results
  • Total fan power
  • Power factor
  • Pressure control
  • EPI (W/cfm)
    • Comparison with Cleanrooms
issues and trends
Issues and Trends…
  • Issues - Contamination control
    • Source: particle, molecular, bio, mechanical, electronic
    • Preciseness, costs, safety, regulation
  • Trends
    • Multi-level particle retention and/or bio containment
    • Minienvironments/Bio-safety cabinet
    • Nano-tech facilities
issues and trends standards
Issues and Trends…Standards

The Institute of Environmental Sciences and Technology (IEST)

  • ISO Standard 14644 (1 through 8): Cleanrooms and Controlled Environments
  • ISO Standard 14698 (1 through 3): Bio-contamination
issues and trends solutions
Issues and Trends… Solutions
  • Resources for clean technologies
    • IEST RPs addressing a variety of cleanroom technologies http://www.iest.org/technical/ccwgs.html
      • Design, construction, operation, compliance, qualifications, procedure, control, etc.
      • WG12 > WG28 > New WGs on Nano-tech facilities
    • LBNL
      • Energy related technologies and strategies
what s coming stay tuned
What’s Coming… Stay Tuned
  • Cleanrooms
  • Minienvironments - upcoming workshop to
    • Share knowledge and improve performance of minienvironments
    • Understand energy implications of minienvironment vs. cleanroom
    • Develop and identify strategies in energy efficiency for effective environmental control
questions

Questions

TTXU@LBL.GOV

Lawrence Berkeley National Laboratory