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Electrostatic Nanocapacitors for Electrical Energy Storage

Electrostatic Nanocapacitors for Electrical Energy Storage Janice E. Reutt-Robey, University of Maryland College Park, DMR 0520471 P. Banerjee, I. Perez, L. Henn-Lecordier, S.B. Lee, G.W. Rubloff.

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Electrostatic Nanocapacitors for Electrical Energy Storage

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  1. Electrostatic Nanocapacitors for Electrical Energy Storage Janice E. Reutt-Robey, University of Maryland College Park, DMR 0520471 P. Banerjee, I. Perez, L. Henn-Lecordier, S.B. Lee, G.W. Rubloff UMD-MRSEC researchers have combined self-assembled nanopores in anodic aluminum oxide (AAO) with multilayer self-limited atomic layer deposition (ALD) to form massive arrays of electrostatic nanocapacitors, achieving energy density >10X higher than conventional electrostatic devices, comparable to electrochemical supercapacitors, while retaining the high power advantages of electrostatics. AAO nanopore 50nm dia ALD TiN BE 6.7nm ALD Al2O3 7.0nm ALD TiN TE 9.3nm Nature Nanotechnology, March 15, 2009, DOI: 10.1038/NNANO.2009.37

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