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Nanoscale Thermoelectric Measurement

Nanoscale Thermoelectric Measurement.

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Nanoscale Thermoelectric Measurement

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  1. Nanoscale Thermoelectric Measurement Substrates for heating length control were designed, including nanoscale metal patterns (heater/thermometer/electrodes) for high measurement accuracy. 2 step e-beam lithography for positioning GST nanostructures on nanoelectrodes were achieved with high alignment accuracy (< 100 nm). Daniel C. Ralph, Cornell University, ECCS 0335765 Experimental structure for Seebeck coefficient measurement on Ge2Sb2Te5 films, J. Lee, T. Kodama, K. Goodson et al, J. Appl. Phys., in press. Target 100 um GST patterns fabricated by 2nd e-beam litho Large metals fabricated by photo litho Small metals fabricated by 1st e-beam litho Schematic of the side view. Dr. Takashi Kodama, Prof. K. Goodson group, Mechanical Engineering Department, Stanford University; Work performed at Stanford Nanofabrication Facility

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