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ARGUS 54 - Optical Sputter Coater Vacuum Process Technology LLC Dr. Keqi Zhang & Ralph Faber PowerPoint Presentation
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ARGUS 54 - Optical Sputter Coater Vacuum Process Technology LLC Dr. Keqi Zhang & Ralph Faber May 1, 2013. Motivations:

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Presentation Transcript
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ARGUS 54 - Optical Sputter Coater

Vacuum Process Technology LLC

Dr. Keqi Zhang & Ralph Faber

May 1, 2013

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Motivations:

  • Offer a deposition tool for optical coating industry that combines the advantages of both e-beam evaporation (large area, fast rate) and IBS deposition (stable process, higher film quality).

Approaches:

  • Plasma enhanced pulsed DC magnetron sputtering
  • Basic concept is based on a 54-inch chamber with a planetary system that contains six 16-inch planets.
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Key Performances / Features:

  • Sputtered deposition of multilayers of metals, and metal oxides
  • Large area, fast deposition rate
    • 6 x 16-inch planets
    • Rate: Ta2O5/Nb2O5: 5Å/s, SiO2: 6Å/s
  • Uniformity: typical ±1.0%, goal: ±0.5%
  • Thickness control
    • Standard: quartz crystal, time power
    • Optional: through-the-planet optical monitoring

(Single Wavelength or Broad Band)

optical sputter coater
Optical Sputter Coater

Pulsed DC ion / plasma enhanced

Materials: Ta2O5/SiO2

Very stable and repeatable process:

Deposition rate: 5.0Å/s --- Ta2O5

6.0Å/s --- SiO2

coating examples ir c ut filter
Coating examples: IR cut filter

Argus’54

Competitor’s

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Current status:

  • Optical properties: excellent
    • Absorption: low
    • Scattering: low
  • Mechanical properties
    • Dense, durable film
    • Film stress: 230 – 300MPa, compressive
  • Film uniformity
    • Less Than ±0.5% on a 16-inch planet
  • High throughput; unparalleled process stability