Spectroscopic Ellipsometry. University of Texas at El Paso Lynn Santiago Dr. Elizabeth Gardner Chem 5369. Ellipsometry – An Essential Tool for Characterizing Nanomaterials. “[The ellipsometry] methods are the workhorse analyses
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University of Texas at El Paso
Dr. Elizabeth Gardner
“[The ellipsometry] methods are the workhorse analyses
of a laboratory, as they are used on almost every project involving
surface chemistry, whether it be a silicon surface or a metal surface.”
James, D.K., Tour, J.M.. Analytica Chimica Acta 568 (2006) 2-19
2. Polarizer - produces light in a special state of polarization at the output
3. Compensator - used to shift the phase of one component of the incident light
4. Analyzer – second polarizer that detects the linearly polarized light reflected off the sample
We have seen that spectroscopic ellipsometry uses a range of wavelengths to analyze a sample.
Now we will see an instrument that uses the same concept but uses one particular wavelength of light to analyze a sample.
Commonly a HeNe laser with the wavelength of 632.8 nmSWE Light Source
This is not from an ellipsometer but shows what a HeNe laser looks like.
Now there exists the technology to use ellipsometry and view a sample while it is being analyzed.