CHEMICAL SENSING USING MEMS. Micro Electro Mechanical Systems. Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology.
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-- Polymerase Chain Reaction (PCR) microsystems for DNA amplification and identification.
-- Micromachined Scanning Tunneling Microscopes (STMs).
-- Biochips for detection of hazardous chemical and biological agents.
-- Improved components (tunable capacitor, inductor) will significantly improve communication system.
-- Also total circuit area, power consumption and cost can be reduced.
-- MEMS accelerometers are quickly replacing conventional accelerometers for crash air-bag deployment systems in automobiles.
-- MEMS accelerometers are small, more efficient and cheap.
--NOx measurements of diesel engines.
-- Jet engine emissions monitoring for NASA.
-- U.S. Air Force for performance measurements (thrust and combustion efficiency) in exhaust of vectored jet engines with afterburner.
-- Potential application to indoor air quality monitoring in buildings and vehicles