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Ashing System Barrel Type

Line up. DES-220-459AVL(Ultima). DES-212-304AVL?(304AV). PACK?

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Ashing System Barrel Type

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    1. Ashing System ~Barrel Type~

    2. Line up DES-220-459AVL(Ultima)

    3. ????

    4. DES-220-459AVL ULTIMA? ????????: 350 [/min] ?? ???(??): 20 [%] ???(????): 10 [%]

    5. DES-220-459AVL ULTIMA?

    6. DES-212-304AVL? DES-212-304AV Wafer Loader / Unloader ??(AVL???) 1???50???/????? 2??????? ??????? 1290W1470D1980H [mm] (AVL?) 1000W900D1730H [mm] (AV)

    7. DES-212-304AVL? DES-212-304AV ???????:f5 or 6 inch ????:?????? or ??????

    8. PACK Series 1??????? ?Coo minimum footprint

    9. Ashing Rate ~f8inches Wafer Normal Resist Data~

    10. Ashing Rate ~f6inches Wafer Normal Resist Data~

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