1 / 10

Grating Coupler Fabrication

Grating Coupler Fabrication. acetone. CF 4. e -. PMMA. Si. SiO 2. Photonic Crystal Fabrication. CF 4. dilute aqua regia. SF 6. e -. PMMA. Mo. Si. SiO 2. Integrated Device. Grating Coupler Geometry. For λ = 1.55 µm, n e = 2.83, and θ = 45°, Λ = 730 nm .

tuan
Download Presentation

Grating Coupler Fabrication

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Grating Coupler Fabrication acetone CF4 e- PMMA Si SiO2

  2. Photonic Crystal Fabrication CF4 dilute aqua regia SF6 e- PMMA Mo Si SiO2

  3. Integrated Device

  4. Grating Coupler Geometry For λ = 1.55 µm, ne = 2.83, and θ = 45°, Λ= 730 nm.

  5. Grating Coupler Characterization

  6. PC Waveguide SEM

  7. Integrated Device SEM 730 nm 426 nm 360 nm

  8. AFM of ~10 nm Grating

  9. Coupling Efficiency of ~10 nm Grating

  10. Coupling Efficiency of ~20 nm Grating

More Related