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Modeling and tests of the electron shading effect in plasma-induced oxide damage

Modeling and tests of the electron shading effect in plasma-induced oxide damage. The electron shading effect. Hashimoto et al. JJAP 1994. Test structures to measure local potentials & currents. Contemplated. First try.

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Modeling and tests of the electron shading effect in plasma-induced oxide damage

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  1. Modeling and tests of the electron shadingeffect in plasma-induced oxide damage

  2. The electron shading effect Hashimoto et al. JJAP 1994

  3. Test structures to measure local potentials & currents Contemplated First try

  4. An ICP is needed to keep KTe high while n is low(to make lD >> trench size)

  5. Initial Results

  6. Plasma conditions Ne, Te, Vp Sheath calculations Ion & electron fluxes Trajectory tracing Ions Current Satisfies boundary condition? modified Potential on boundary Electric fields Boundary recognition Input guess to Potential on boundary YES END NO Calculation flow chart

  7. Potential lines

  8. Modeling: ion orbits in given E-field

  9. 0th iteration: Ions collected in sidewall bins (42000 ions, 0->L)

  10. Convergence after many iterations

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