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INSULATORS MADE BY ECR PLASMAS ON Si or GaAs SUBSTRATES AT ROOM TEMPERATURE

INSULATORS MADE BY ECR PLASMAS ON Si or GaAs SUBSTRATES AT ROOM TEMPERATURE. J.A. Diniz, I. Doi and J.W. Swart . UNICAMP, CCS and DSIF/FEEC, CEP.13083-970, CP. 6101, CAMPINAS, SP, BRAZIL . OUTLINE CCS/DSIF/UNICAMP. MOTIVATION INTRODUCTION EXPERIMENTS RESULTS AND DISCUSSIONS

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INSULATORS MADE BY ECR PLASMAS ON Si or GaAs SUBSTRATES AT ROOM TEMPERATURE