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Development of HV CMOS sensors for 3D integration

Development of HV CMOS sensors for 3D integration. Ivan Peri ? Bonn, CPPM, CERN, Heidelberg. Overview. Collaboration between Bonn, CPPM, CERN, Heidelberg Sensors for particle physics in standard CMOS Merging of two technologies: HV CMOS detectors 3D integrated CMOS

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Development of HV CMOS sensors for 3D integration