'Native oxide' presentation slideshows

1.14k views • 72 slides

Farshid Karbassian

Farshid Karbassian. Oxidation. Oxide Layer Applications Types of Oxidation Dry Oxidation Wet Oxidation Modeling C-V Measurement. Outline. Oxide Layer Applications. Nitride stress buffer. Defect removal. Gate dielectric. Oxide Applications: Native Oxide.

1.26k views • 37 slides

Selective Atomic Layer Deposition of TiO 2 on Silicon/Copper-patterned Substrates

Selective Atomic Layer Deposition of TiO 2 on Silicon/Copper-patterned Substrates. UIC REU 2011 AMReL , University of Illinois at Chicago Abigail Jablansky Department of Chemical and Biomolecular Engineering, University of Pennsylvania. What is ALD?. Atomic layer deposition Method:

402 views • 15 slides