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Multi gate - PowerPoint PPT Presentation

Front End Processes

Front End Processes. Starting & Emerging Materials Surface Preparation Thermal & Thin Films Doping Etching Stacked-Capacitor DRAM Trench-Capacitor DRAM Flash Memory FeRAM. Carl Osburn (osburn@ncsu.edu) Jeff Butterbaugh (jeff.butterbaugh@fsi-intl.com). ITRS Public Conference

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Multi gate - PowerPoint PPT Presentation

Front End Processes