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Isolated phase edge - PowerPoint PPT Presentation

Figure 10.2 Comparison of the resolution for different feature types ( l = 193 nm, NA = 0.9, s = 0.7). Here, L/S me

Figure 10.1 Resolution can be defined as the smallest feature which meets a given DOF specification. Shown are results for equal lines and spaces, l = 193 nm, NA = 0.9, s = 0.7, typical resist on a non-reflective substrate.

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Isolated phase edge - PowerPoint PPT Presentation

Figure 10.2 Comparison of the resolution for different feature types ( l = 193 nm, NA = 0.9, s = 0.7). Here, L/S me