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Interconnect parameter - PowerPoint PPT Presentation

Summary

Summary. Current density in a signal line was estimated, based on the simple circuit shown in Fig.1. This circuit is scaled down according to ITRS 2003. Wire of the signal line is assumed to be a intermediate wire. Wire length is assumed to be (wire pitch) x 200.

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ITRS2003 k eff Roadmap Revision

4.5. Calculated based on delay time using typical critical path. 4.0. Estimated by typical low- k materials and ILD structures. k =3.0-3.3. Described in roadmap table at ITRS2002. 3.5. k =2.6-3.0. Effective Dielectric Constant; k eff. 3.0. k =2.4-2.8. 2.5. k =2.0-2.4. 2.0.

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Interconnect parameter - PowerPoint PPT Presentation

Summary

ITRS2003 k eff Roadmap Revision