'Immersion lithography' presentation slideshows

Lecture 5

Lecture 5. Optical Lithography. Intro. For most of microfabrication purposes the process (e.g. additive, subtractive or implantation) has to be applied selectively to particular areas of the wafer: patterning is required; Predominately done by optical lithography. Intro.

670 views • 41 slides

MAS.961 Special Topics: How To Make Something That Makes (almost) Anything NanoFabrication

362 views • 31 slides

NANO-Lithography

NANO-Lithography. Name : DEKONG ZENG EE235 Spring 2007. Recent progress in high resolution lithography Daniel Bratton, Da Yang, Junyan Dai and Christopher K. Ober* Materials Science and Engineering, Cornell University, Ithaca, NY 14853, USA. All material gathered from Public Domain.

544 views • 19 slides

NANO-Lithography

NANO-Lithography. Name : DEKONG ZENG EE235 Spring 2007. Recent progress in high resolution lithography Daniel Bratton, Da Yang, Junyan Dai and Christopher K. Ober* Materials Science and Engineering, Cornell University, Ithaca, NY 14853, USA. All material gathered from Public Domain.

382 views • 19 slides

Spacer Lithography Technology

Spacer Lithography Technology. Xin Sun EE235 Presentation Feb 13, 2008. Outline. Introduction Spacer Lithography Process Discussion. IC Technology Advancement. Professor Tsu-Jae King Liu, FLCC Seminar 2006. Lithography Challenges. Continued Scaling of Feature Size Shorter wavelength

204 views • 8 slides

Evanescent Wave Imaging Using Optical Lithography

208 views • 7 slides