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Electron energy transport module - PowerPoint PPT Presentation

ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS

ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS CONSIDERING WAVE EFFECTS* Yang Yang a) and Mark J. Kushner b) a) Department of Electrical and Computer Engineering Iowa State University, Ames, IA 50011, USA yangying@iastate.edu

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401 views • 23 slides

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DEVELOPMENT OF ION ENERGY DISTRIBUTIONS THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yiting Zhang a , Nathaniel Moore b , Walter Gekelman b and Mark J. Kushner a (a) Department of Electrical and Computer Engineering,

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276 views • 20 slides

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Electron energy transport module - PowerPoint PPT Presentation

ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS

AGENDA