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Dlc films - PowerPoint PPT Presentation

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??????? ??? ??? DLC ??? ???? ??. ????????? ??? , ??? , ? ? ?. Contents. Introduction to Residual Stress of Thin Films Industrial Application and Residual Stress of DLC Films Elastic Modulus Measurement by a Simple Micro-Fabrication. Residual Stress of Thin Films.

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595 views • 47 slides
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????? ?? ??? ??? ????. 2006. 5. 30. KIST- ????? ?? ?? KIST ???????? ? ? ?. Contents. Brief Introduction to Diamond-like Carbon Coatings Applications of DLC to Automobile Parts DLC Research at KIST. Hard disk. Heart valve. What is DLC ?. Amorphous Solid Carbon Film

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669 views • 39 slides
Comparison of Elastic Modulus of Very Thin DLC Films Deposited by r.f.-PACVD and FVA

Comparison of Elastic Modulus of Very Thin DLC Films Deposited by r.f.-PACVD and FVA

Comparison of Elastic Modulus of Very Thin DLC Films Deposited by r.f.-PACVD and FVA. Jin-Won Chung, Churl-Seung Lee, Dae Hong Ko * , Jun-Hee Hahn ** and Kwang-Ryeol Lee Future Technology Research Division, Korea Institute of Science and Technology

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694 views • 30 slides
Mechanical Properties of diamond-like carbon films grown by plasma CVD

Mechanical Properties of diamond-like carbon films grown by plasma CVD

Mechanical Properties of diamond-like carbon films grown by plasma CVD. By: Liwei Wang Instructor: Dr. Y. Tzeng For: ELEC 7730 Date: Oct 17, 2003. Questions. How the hydrogen incorporation induced in the DLC film deposition effect the mechanical properties?

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1.05k views • 24 slides
??? ??? ??? ??? (Me-DLC) ??? ???? ?? ; ??? ??? ??????

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??? ??? ??? ??? (Me-DLC) ??? ???? ?? ; ??? ??? ??????. 23, Sep., 2005 KAIST. ????? ????. ????????? ???????? ??? , ??? , ??? , ??? , ???. Diamond-like carbon (DLC) films. High hardness High wear resistance Low friction coefficient Optical transparency Chemical inertness

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613 views • 18 slides
Introduction

Introduction

Plasma Assisted Synthesis and Application of Diamond-like Carbon Films Thin Film Technology Research Center Korea Institute of Science & Technology. Introduction.

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108 views • 10 slides
!!! The curious jumping point of stress

!!! The curious jumping point of stress

1. 2. ?. Experimental. Deposition parameters. Schematic diagram of present system. Working gas: Ar + C 6 H 6 Base pressure : 2.0 ?10 -6 Torr Deposition Pressure : 0. 2 ~ 6 ?10 -4 Torr Ion gun power: 100 - 150 V; 0.48 A Sputter gun power: 600 V ; 0.10~0.16 A Bias Voltage : -200V

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163 views • 1 slides

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