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Contact hole - PowerPoint PPT Presentation

Section 10: Layout

Section 10: Layout. Layout Design Rules. (1) Absolute-Value Design Rules * Use absolute distances (2) ? -based Design Rules. 2. Metal-Si Contact Hole. (same rule for Metal-poly). Min. contact hole = 2 ? x 2 ?. Min contact hole to diffusion layer distance = ?. ?. Al. SiO 2. SiO 2.

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Contact hole - PowerPoint PPT Presentation

Section 10: Layout