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Advanced FIB Circuit Edit: Cu Line Deprocessing

PBS&T. Valery Ray (1) , Tommy Chang (2) , Chun Hung Chen (2) , and Ching Chi Yang (2) (1) PBS&T, MEO Engineering Co., Inc. USA vray@partbeamsystech.com (2) Material Analysis Technology, Inc. Hsinchu, Taiwan. Advanced FIB Circuit Edit: Cu Line Deprocessing. Outline.

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40nm node - PowerPoint PPT Presentation

Advanced FIB Circuit Edit: Cu Line Deprocessing