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Update from ALD group IN ANL

Update from ALD group IN ANL. Qing Peng, Anil Mane, Jeff Elam Energy System. With collaboration from Seon Woo Lee and Hau Wang. NEW IV measurement method. Picture of pattern electrodes on the ALD film with two electrode under measurement. Size of the Metal pad: 300 um, 200um, 100um, 50um

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100 um distance - PowerPoint PPT Presentation

Update from ALD group IN ANL