MEMS and Microsystem - PowerPoint PPT Presentation

MEMS and Microsystem

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Overview . MEMS: MicroElectroMechanical System.Scales of MEMS: 1 micro meter to 1 millimeter (10-6 to 10-3 m).Two principal components in MEMS: a sensing or actuating element and a singal transduction unit.. Purpose of Microsensors. To sense the existence or the intensity of certain physical, chem

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MEMS and Microsystem

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