NCSR DEMOKRITOS

1. NCSR DEMOKRITOS • Production Center : Institute of Microelectronics (IMEL) • Regional Center : Institute of Nuclear Physics (INP) • Si Detector development for the Preshower in DEMOKRITOS is a joint activity between the two institutes initiated in 1997 • Design by INP • Fabrication by IMEL • Module construction, quality control and test by INP Preshower PRR July 5-6 2001

2. NCSR DEMOKRITOS short review • Three versions tested • 60 mm x 60mm preshower detector • Ten wafers (4-inch) processed (1997) • Good test structures but problematic preshower detectors Preshower PRR July 5-6 2001

3. NCSR DEMOKRITOS short review • 60mm x 60mm preshower detectors with n+ guard ring • Fifteen wafers processed (1999) • Good test structures, problematic preshower detectors Preshower PRR July 5-6 2001

4. NCSR DEMOKRITOS short review • Detectors from the 1999 batch • Detector from the 1997 batch Both fabricated with a 3-inch mask aligner Preshower PRR July 5-6 2001

5. NCSR DEMOKRITOS short review • 63 mm x 63 mm detectors fabricated with a new 4-inch aligner (2000) • Two batches (V,Z) of 10 detectors each one were processed • Yield 50% • A new batch of 15 detectors is currently in progress (june - july 2001) Preshower PRR July 5-6 2001

6. NCSR DEMOKRITOS 2000 processing Sum of 32 strips 32 individual strips Detector on wafer without passivation Preshower PRR July 5-6 2001

7. (10 μA, 300 V) NCSR DEMOKRITOS 2000 processing Detectors : V2,V3,V5, V8,V9,V10,V11 Total leakage current for seven detectors : batch V, detectors on wafer without passivation Preshower PRR July 5-6 2001

8. NCSR DEMOKRITOS 2000 processing Passivation: Low Temperature Oxidation ~ 0.3 μm SiO2 One strip with irregular behavior excluded Detectors V1,V3,V9 V11, Z2 • Measurements for 5 detectors after passivation (4 detectors from batch V, 1 from batch Z) • 3 detectors on wafer • 2 off wafer Preshower PRR July 5-6 2001

9. NCSR DEMOKRITOS 2000 processing Preshower PRR July 5-6 2001

10. NCSR DEMOKRITOS 2000 processing Plasma etching during passivation poses problems Preshower PRR July 5-6 2001

11. NCSR DEMOKRITOS 2000 processing Preshower PRR July 5-6 2001

12. NCSR DEMOKRITOS 2000 processing Preshower PRR July 5-6 2001

13. NCSR DEMOKRITOS: IMEL detector dicing Y2 Wafer saw machine : Micro Automation 602M Y1 X1 X2 Dimensions measured with ~5 μm accuracy Preshower PRR July 5-6 2001

14. Eye 1160μm to the p+ of the first strip 63000 μmto the other end of the detector Normally, during scribing, the center of the scribing saw will be placed here. The scribing tool is 50 μm thick. So, in average, an estimated detector width of 62960 μm is expected after dicing Center of scribing line is 5 μm from detector edge NCSR DEMOKRITOS : IMEL detector dicing Preshower PRR July 5-6 2001

15. NCSR DEMOKRITOS detector production plans Preshower PRR July 5-6 2001

16. NCSR DEMOKRITOS :IMEL equipment • Wet bench (3) cleaning of Si wafers • Medium current ion implanter • EATON NV-3206 (20-200 keV) • Low Pressure Chemical Vapor Deposition • TEMPRESS • 6-inch double side mask aligner (Carl Suss) • Thermal processing equipment • TEMPRESS Preshower PRR July 5-6 2001

17. NCSR DEMOKRITOS :INP available space & equipment • Space : 80 m2 • Temperature & humidity control • (COMPTROL 4000: SULTZ) • Prober : Carl Suss PA 150 • enclosed on a light tight box • CV : HP4092A • IV : Keihley 6517 current meter & voltage source • Pick and place system : FRITSCH Preshower PRR July 5-6 2001

18. NCSR DEMOKRITOS :INP Preshower specific equipment • 32 Switch board • Probe card • CRISTAL software installed and tested Preshower PRR July 5-6 2001

19. NCSR DEMOKRITOS :INP μ-module assembly Work on μ-module assembly goes in parallel and in close collaboration with Dubna Preshower PRR July 5-6 2001

20. NCSR DEMOKRITOS :INP μ-module assembly Preshower PRR July 5-6 2001

21. NCSR DEMOKRITOS :INP μ-module assembly Preshower PRR July 5-6 2001

22. NCSR DEMOKRITOS :INP CRISTAL data base • CRISTAL initially installed in March 2000 • Two machines running Win2K • One machine with CRISTAL (Orbix, Objetivity and CRISTAL LC) • acting as data base server and operator workstatio • A second machine runs Labview and communicates with physical • instruments • VI’s modifiedfor the local instruments ( Keithley 6517 and HP 4192A LF) • Now the systemruns with PRESHOWER_Config_v31.DB • Barcode reader purchasedin April 2001 • Dummy barcodes printed by using a shareware program • (Label Magic v1.1) and registered by CRISTAL • Latest upgrade in CRISTAL(April 2001) permitted successful duplication • of dummy data to the Central Storage at CERN Preshower PRR July 5-6 2001

23. NCSR DEMOKRITOS :INP Conclusions • Time per module for construction, quality control and testing : ~ 3 hours • Man power for construction, quality control and testing : • -two technicians for μ-module assembly • -one person for μ-module testing • Detectors : 1000 to be provided by the Greek groups and preferably • fabricated in Greece (Institute of Microelectronics) • alternative providers identified : ELMA • Construction, QC and testing of 500 modules by the Preshower group • of the INP Preshower PRR July 5-6 2001