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FEI4A Wafer Probing

FEI4A Wafer Probing. Andrew Stewart 21 September 2012. Set-up of semi-automatic wafer probing of FE-I4A wafers near completion. Cascade S300 probe station added to STControl software.

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FEI4A Wafer Probing

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  1. FEI4A Wafer Probing Andrew Stewart 21 September 2012

  2. Set-up of semi-automatic wafer probing of FE-I4A wafers near completion. • Cascade S300 probe station added to STControl software. • Reasonable success of achieving a good electrical contact. In a test of probing 6 consecutive die only 1 failed to return test data. • Measurement repeatability at different probe sites looks good (see slides 5 to 11). • Currently use USBpixTestI4 to conduct Global Register, Pixel Register & Sync Scan tests and STControl to conduct Analogue, Digital and Threshold scans. • Would like to use STControl wafer test panel for all tests and automated probing. However, I have encounted a number of issues establishing a full prim list of tests.

  3. Issues with wafer panel prim list. • Regulators On: Does this turn on analogue and digital power supplies? Doesn’t appear to work. • How are the GR & PR tests and current readings (IDDD1etc) accessed? These results don’t appear to be displayed in the Module Analysis panel.

  4. Wafer results spreadsheet. • No pass/fail criteria set yet.

  5. Repeatability Measurements

  6. Summary of Repeatability Measurements

  7. Die 18: Initial Analogue Occupancy Plot (Left) and Analogue Occupancy after re-probing (Right)

  8. Die 18: Initial Digital Occupancy Plot (Left) and Digial Occupancy after re-probing (Right)

  9. Die 18: Initial Threshold Scan (Left) and Threshold Scan after re-probing (right)

  10. Die 20: Initial Analogue Occupancy Plot (Left) and Analogue Occupancy after re-probing (right)

  11. Die 20: Initial Digital Occupancy Plot (Left) and Digital Occupancy after re-probing (Right)

  12. Die 20: Initial Threshold Scan(Left) and Threshold Scan after re-probing (Right)

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