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Magnetic Nanofluidics ME342 Design Project Update 2

Magnetic Nanofluidics ME342 Design Project Update 2. Abhishek Dhanda Kwan-Kyu Park Michael Pihulic Katherine Tsai July 13, 2006. Progress: Equipment Training. Completed Kwan-Kyu: Thermco1,2,poly, P-5000 Katherine: Tylan1-6, EValign, EVbond* Mike: Wafer Saw, EValign, EVbond* Pending

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Magnetic Nanofluidics ME342 Design Project Update 2

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  1. Magnetic Nanofluidics ME342Design Project Update 2 Abhishek Dhanda Kwan-Kyu Park Michael Pihulic Katherine Tsai July 13, 2006

  2. Progress: Equipment Training • Completed • Kwan-Kyu: Thermco1,2,poly, P-5000 • Katherine: Tylan1-6, EValign, EVbond* • Mike: Wafer Saw, EValign, EVbond* • Pending • SEM, E-beam, PMMA station, Metalica, wbgeneral

  3. Progress: Masks Set 1: Microchannels (Etch1, Metal1, Back, Pyrex) • H = 10 um, 5 um • W = 30 um, 10 um, 5 um, zigzag • L = 475 um - 500 um Set 2: Nanochannels (Ebeam, Etch2, Metal2, Back, Pyrex) • H = 500 nm, 100 nm • W = 1 um, 500 nm, 100 nm • L = 30 um

  4. Mask Set 1: Microchannels Revisions since 6/10/06: • Reduced die size by bending microchannels • Increased number of devices per wafer • Rearranged layout to facilitate wafer dicing • Added labels to each die • Added trenches around metal labels

  5. Mask Set 1: Microchannels

  6. Progress • Processing: Steps 1 (wbdiff) & 2 (tylan) • Purpose: Etch stop for nanochannel definition • Time = 38 min 23 sec; Temp = 1100 C • tox(target) = 0.5 µm • 1st batch, 4 wafers • Tylan1: tox(measured)=~0.46 +/- 0.006 µm (3) • 2nd batch, 4 wafers • Tylan2: tox(measured) =~0.5 +/- 0.0052 µm (3)

  7. Progress • Materials purchased • Particles (www.micromod.de) • 6 µm fluorescent, magnetic particles • 250 nm magnetic particles • 15 nm fluorescent particles • Si wafers for nanochannels (SNF stockroom) • 4 for 500 nm channels • 4 for 100 nm channels • SOI wafers for microchannels (Pruitt inventory) • 1 for 5 um channels • 1 for 10 um channels

  8. Emergent Problems • Progress delay • SNF mask writer down for repairs (Back-up plan: mask writer @ UC Berkeley) • Coral shut down on 7/11/06 • ThermcoPoly shut down as of 7/12/06 • Resource • Metal tweezers out of stock until August • Process undefined • Litho on pyrex wafer - Alignment issues? • Selective etch for pyrex? • Etc. • Need to buy more SOIs? (budget?) • Testing setup

  9. Future Work • Current week • Revise mask set 1 (microchannels) if necessary. Submit to Berkeley • Finish mask set 2 (nanochannels) • Poly-Si deposition (nanochannels) • Next week • Masks arrive • E-beam (nanochannels) • Litho (microchannels)

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