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Prepared by: Sunil Indluru Dept. of Electrical and Computer Engineering

ECE5320 Mechatronics Assignment#01: Literature Survey on Sensors and Actuators Topic: Electrostatic Actuators. Prepared by: Sunil Indluru Dept. of Electrical and Computer Engineering Utah State University sunilindluru@cc.usu.edu. 3/9/2007. Outline. Reference list

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Prepared by: Sunil Indluru Dept. of Electrical and Computer Engineering

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  1. ECE5320 MechatronicsAssignment#01: Literature Survey on Sensors and Actuators Topic: Electrostatic Actuators Prepared by: Sunil Indluru Dept. of Electrical and Computer Engineering Utah State University sunilindluru@cc.usu.edu 3/9/2007

  2. Outline • Reference list • To probe further • Basic working principle • Various kinds of Electrostatic Actuators • Device Diagram • Graphical Response • Relative Merits • And many more relevant issues in applications (such as, how to choose, cost information, where to buy etc.) ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  3. Reference list • http://www- bsac.eecs.berkeley.edu/projects/ee245/Lectures/lecturepdfs/Lecture10.Handouts.pdf • http://itcprogramdev.org/itc2003proc/Papers/PDFs/0027_1c.pdf • http://arri.uta.edu/acs/jmireles/MEMSclass/lecture4.pdf ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  4. Further Reading • Micro Electrostatic Actuators In Dual-Stage Disk Drives With High Track Density - Y. Tang, S.X. Chen and T. S. Low - IEEE TRANSACTIONS ON MAGNETICS, • Electrostatic Linear Microactuator Mechanism for Focusing a CCD Camera Akihiro Koga, Koichi Suzumori, Member, IEEE, Hajime Sudo, Shoichi Iikura, and Masanobu Kimura - JOURNAL OF LIGHTWAVE TECHNOLOGY, • Electrostatic Actuator with Novel Shaped Cantilever - Yoshihiko Hirai, Yoshinari Marushima, Shinnosuke Soda, Donghao Jin, Hiroaki Kawata, Kouji Inoue * and Yoshio Tanaka • MEMS Electrostatic Actuators for Optical Switching Applications - John D. Grade and Hal Jerman • New MOEMS-Switch Device with Electrostatic Actuator - E. Thielicke, E. Obermeier - IEEE 2002 • http://www.sandia.gov/mstc/technologies/micromachines/tech-info/bibliography/biblog_general.html • Related Links in MEMS: http://www.sandia.gov/mstc/technologies/micromachines/links/index.html • http://www.mems-exchange.org/ ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  5. Basic Working Principle • The Electrostatic force (attraction) between moving and fixed plates as voltage is applied between them is the actuation principle. • Force Exerted by a Capacitor - • For a simple plate capacitor, it can be shown that for a constant voltage between the plates, the following equation holds: 2. The actuator design consists of a comb of interwoven electrodes. ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  6. Electrostatic actuators, linear motion • Structures for linear motion • Plate and membrane structures • Comb structures (normal force) ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  7. Electrostatic actuators, rotational • Structures for rotational motion • Comb Structures - Torque is small - Lifetime is short due to friction 2. Wobble motor Rotor that is located inside a stator forms the axis of the motor - electric field moves the rotor inside the stator - friction rotates rotor ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  8. Other Electrostatic Actuators Comb Drive Capacitor Plate Zipping Actuator ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

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  18. Limitations & Issues ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  19. Device Diagram The arrangement of the electrodes allows for the actuation of 3 test mass modes, translation rotation and tilt ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  20. Force Displacement Curve ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  21. Phase response ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  22. Relative Merits of Electrostatic Actuators Pros • Scaling-down is beneficial • Easy to miniaturize (fabricate) • High Bandwidth • Low power consumption: I = C*(dV/dt) Cons • A dust particle and surface defects can cause a breakdown due to a small air gap • High voltages • Low force density • Require high resolution mask/fabricate to be efficient ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  23. Manufacturers • http://www.memx.com/technology.htm • http://www.sandia.gov/mstc/technologies/micromachines/tech-info/overview/index.html ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

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