Vacuum chuck for probe station
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Vacuum chuck for probe station. contacts: Howard Wieman [email protected] work: 510 495-2473 cell: 631 431-8236 Eric Anderssen [email protected] 510 495-2821.

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Vacuum chuck for probe station

Vacuum chuck for probe station

contacts:

Howard Wieman

[email protected]

work: 510 495-2473

cell: 631 431-8236

Eric Anderssen

[email protected]

510 495-2821


This vacuum chuck will be used to hold and accurately locate 2 mil thick silicon chips in a probe station. It consists of two aluminum plates bonded to a SLA manufactured vacuum manifold.

This is a request for the machined aluminum parts.

The parts are modeled with SolidWorks 2009

Top Assembly: “vc Probe Assembly.SLDASM”


Machining tasks
machining tasks 2 mil thick silicon chips in a probe station. It consists of two aluminum plates bonded to a SLA manufactured vacuum manifold.


Vc probe top sldprt
2 mil thick silicon chips in a probe station. It consists of two aluminum plates bonded to a SLA manufactured vacuum manifold.vc probe top.SLDPRT”

tolerance:

top and bottom surface flat and parallel to 2 mil

Finish 62min

tolerance:

locating edges for the silicon chips – relative location with respect to each other good to 1 mil


Vc probe suction plate sldprt
2 mil thick silicon chips in a probe station. It consists of two aluminum plates bonded to a SLA manufactured vacuum manifold.vc probe suction plate.SLDPRT”

tolerance:

top and bottom surface flat and parallel to 2 mil

tolerance:

capture lip radius

-0 + 4 mil

Finish 62min

must suck down to a metal vacuum plate


Max nose radius
Max Nose 2 mil thick silicon chips in a probe station. It consists of two aluminum plates bonded to a SLA manufactured vacuum manifold.Radius

Max Nose radius of 0.020”

Not critical


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