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UHV Cleanliness Requirements: Cleaning/Baking and Contamination Control. Dennis Coyne HAM-SAS Bidder’s Conference @ LIGO Laboratory, Caltech 25 October 2005. Livingston, LA. Hanford, WA. Basic UHV Compatibility Requirements. Cleanliness Requirements:

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UHV Cleanliness Requirements:Cleaning/Baking and Contamination Control

Dennis Coyne

HAM-SAS Bidder’s Conference

@ LIGO Laboratory, Caltech

25 October 2005

Livingston, LA

Hanford, WA

LIGO R&D


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Basic UHV Compatibility Requirements

  • Cleanliness Requirements:

    • Achieve a Non-Volatile Residue (NVR) level of A/50 or better (per MIL-STD-1246C or IEST-STD-CC1246D) on piece parts before clean assembly

    • Achieve a Particulate Cleanliness Level of 50 or better (per MIL-STD -1246C or IEST-STD-CC1246D) on piece parts before clean assembly

    • Perform clean assembly and all steps through UHV Packaging in a Class 100 Clean Room (per FED-STD-209)

    • Comply with Contamination Control Protocols defined in E048228 (M990034 is also a good guide)

    • Package the Clean Parts per E048227

  • No Virtual Leaks

    • Full Penetration Welds

  • No Cold Welding

    • Stainless fasteners into Aluminum

    • Silver coated Stainless Fasteners into Stainless

    • Oversized pilot and tap for tapped holes

LIGO R&D


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Ultra-High Vacuum (UHV) Cleanliness Requirements Related to Manufacturing Processes

Notes:

The process sequence depicted here is suggestive, and not meant to be prescriptive.

Loaded GAS Filter, Spring Blades to be Creep Relaxed in Air Bake

LIGO R&D


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Practical UHV Requirements Manufacturing Processes

  • Must pre-clean parts before welding and winding

  • Must clean parts multiple times during fabrication

  • Must thoroughly clean parts!

    • “gross” clean with solvents and acids

    • Mechanical clean (scrub) parts especially tapped holes – multiple times, with powered rotary tool – during “gross” and “precision” clean steps

    • “precision” clean with hot, water soluble detergents (steam or hot water spray) – multiple times

    • Never let parts dry with detergent

    • Multiple rinses with Deionized water

  • Must bake parts (air or vacuum) after “precision” cleaning

  • Must maintain parts in a class 100 clean room

    • or keep wrapped in “UHV Foil” and keep in at least a class 10,000 clean area)

    • limit exposure, keep wrapped /covered when possible

  • Must Control Contamination with Good Clean Room Practice

    • All tools must be cleaned, air baked, wrapped & kept in Class 100 areas

    • All personnel must wear full clean room garb, including hair net, face mask and gloves

LIGO R&D


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UHV Requirement References Manufacturing Processes

  • Particulate Level 50 and NVR Level A/50 per MIL-STD-1246C or IEST-STD-CC1246D

  • Cleaning for UHV Service:

    • Contractor is to certify the cleaning and baking process with representative parts to demonstrate 1246 Level 50-A/50

      • NVR Level to be confirmed via FTIR (Fourier Transform Infrared analysis)

      • Particulate level to be confirmed by particle sizing and counting or equivalent particle area coverage

    • LIGO Lab will independently assess the contractor’s cleaning/baking process with representative parts by RGA (mass spectrometer outgassing analysis) per E960022

    • Guidance: E048225, Process Specification for Ad-LIGO Seismic Isolation System In-Vacuum Mechanical Elements: Fabrication (includes cleaning)

  • Contamination Control:

    • Per E048228, Process Specification for Ad-LIGO Seismic Isolation System In-Vacuum Mechanical Elements: Contamination Control

    • Additional Guidance:

      • M990034, LIGO Contamination Control Plan

      • FED-STD-209, Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones

      • ISO-14644, Cleanrooms and controlled environments[ISO-14644 superceeds FED-STD-209]

  • Packaging:

    • Per E048227, Process Specification for Ad-LIGO Seismic Isolation System In-Vacuum Mechanical Elements: UHV Packaging

LIGO R&D


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Class 100 Manufacturing Processes

Clean Room

Class 10,000

Room

HEPA Filter

Gowning Room

“Sticky” Mat

Clean Room & Gowning Room

LIGO R&D


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HAM Chamber Clean Rooms Manufacturing Processes

“Full” Clean Room Dress

Concrete Floor – Cleaned Routinely, not ideal, but serviceable

LIGO R&D


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UHV Foil Manufacturing Processes

Annealed (baked) UHV Aluminum Foil for Wrapping Parts

LIGO R&D


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