UHV Cleanliness Requirements: Cleaning/Baking and Contamination Control. Dennis Coyne HAM-SAS Bidder’s Conference @ LIGO Laboratory, Caltech 25 October 2005. Livingston, LA. Hanford, WA. Basic UHV Compatibility Requirements. Cleanliness Requirements:
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HAM-SAS Bidder’s Conference
@ LIGO Laboratory, Caltech
25 October 2005
The process sequence depicted here is suggestive, and not meant to be prescriptive.
Loaded GAS Filter, Spring Blades to be Creep Relaxed in Air Bake
Class 100 Manufacturing Processes
“Sticky” MatClean Room & Gowning Room
“Full” Clean Room Dress
Concrete Floor – Cleaned Routinely, not ideal, but serviceable
Annealed (baked) UHV Aluminum Foil for Wrapping Parts