Role of Humidity and Temperature Controlled Chamber in Silicon Wafer Manufacturing

1. ROLE OF ROLE OF HUMIDITY AND HUMIDITY AND TEMPERATURE TEMPERATURE CONTROLLED CONTROLLED CHAMBER IN CHAMBER IN SILICON WAFER SILICON WAFER MANUFACTURING MANUFACTURING During the manufacturing and repair of silicon wafers and other semiconductor wafers, a clean environment is essential. This involves conducting all stages within a sealed environment where air circulation is purified using HEPA or ULPA filters in the clean room. Preventing the deposition of particles or condensate on silicon wafers is important. Additionally, it is vital to maintain high filter efficiency throughout the filter's operational lifespan. In this field, research initiatives involve studying the impact of humidity within a humidity controlled chamber on the deposition of water vapor on both oxidized and unoxidized silicon. Furthermore, additional studies have delved into examining how temperature and humidity contribute to the deterioration of silicon crystals. Typically, silicon wafers undergo sealing processes to shield them from environmental conditions. Assessing the efficacy of the sealing material and techniques involves subjecting the sealed wafers to testing in a controlled environment that replicates the array of conditions they may encounter throughout their service life. Given the elevated expenses associated with these materials and the requisite precision, such experiments find optimal suitability within compact temperature controlled chamber, demonstrated by systems like the Hygro-Remote. www.geocalibration.com