2012 summer itrs environmental safety health twg update san francisco ca usa n.
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2012 Summer ITRS Environmental/ Safety/ Health TWG Update San Francisco , CA USA. July 12, 2012. Environmental, Safety & Health TWG. Dave Speed (IBM ) Shane Harte (ESIA0 Nausikaa van Hoornick (IMEC) Fiona Lyons (Intel) Harry Thewissson (NXP) Alain Pardon IMEC) Mario Chen (DuPont)

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environmental safety health twg
Environmental, Safety & Health TWG

Dave Speed (IBM)

Shane Harte (ESIA0

Nausikaa van Hoornick (IMEC)

Fiona Lyons (Intel)

Harry Thewissson (NXP)

Alain Pardon IMEC)

Mario Chen (DuPont)

Deb Kaiser (NIST)

Kurt Werner (3M)

Reyes Sierra (SRC ERC)

Jim Field (SRC ERC)

Srini Raghavan (SRC ERC)

Slava Libman (Air Liquide)

Paul Connor (Dow)

Pete Trefonas (Dow)

Tom Huang (SEMATECH)

Dan Herr (UNC-G)

Laura Mendicino (Freescale)

Steve Brown (Intel)

Hsi-An Kwong (ISMI)

Chris Lee (TI)

Andreas Neuber (AMAT)

Mary Majors (APCI)

Masahiro Takemura (NIMS)

Leo Kenny (Intel)

Alan Knapp (Siemens)

Dave Maloney (Intermolecular)

Terry Francis (Matheson)

Reed Content (GF)

Francesca Illuzzi (Micron)

Steve Tisdale (Intel)

Hans-Peter Bipp (Infineon)

Steve Moffat (AMAT)

SJ Ko (Hynix)

Laurie Beu (SEMATECH)

Bob Helms (UT Dallas)

Walter Worth (SEMATECH)

Mike Garner (Stanford)

Gopal Rao (Intel)

key messages
Key messages
  • No major changes to the 2012 roadmap
  • 2011 represented a transition year for the ESH Roadmap
    • Streamlining of requirement tables (strategic emphasis)
    • Significant increase in team membership, broad representation
    • Emphasis on proactive, integrated approach, leveraging the technology expertise of the industry
    • Sub-team groups within ESH created to interface with key TWGs
  • Green/sustainable chemistry/engineering concept moving to implementation phase, to enable 2013 roadmap re-write
  • Ongoing look-ahead on key trends for the regulatory/compliance landscape
  • Standards mapping, interface and development (SEMI)

ESH Scope and Drivers


Emissions, Safety



Natural resource usage






& Test




End of Life



  • ESH is driven by site operations, product content, supply chain, brand impacts, regulatory requirements and natural resource usage
  • Ensure that long term technology development is not gated by EHS issues
  • Leverage unique industry technologies to proactively meet EHS challenges
  • Employ the concept of green (sustainable) chemistry and engineering as a framework methodology
  • Fully maximize opportunities for ESH innovation in critical areas
what has changed
What has changed?
  • Greater focus on green manufacturing and sustainability
  • Proliferation of legislation, regulations
    • Variations on common themes (REACh) : differences across geographies
    • Cost, IP and brand impacts
    • Differences in metrics and standards
    • From US driven to an array of regulatory sources
  • An emphasis on the global view across supply chains, in addition to local site requirements
  • Broader view of ESH (in the context of sustainability, governance and social responsibility)
  • More complex materials are requiring increased development time, cost and EHS control measures
esh itwg roadmap strategies
ESH iTWG Roadmap Strategies


  • Understand (characterize) processes and materials during development phase
  • Use materials that are less hazardous or whose byproducts are less hazardous
  • Design products and systems (equipment and facilities) that consume less raw material and resources
  • Make the factory safe for employees and the communities where we operate

Additional focus

  • Integration of Green Chemistry Principles into the ITRS
  • Proactive engagement with stakeholder partners and customers to reset strategic focus of the roadmap
green sustainable chemistry principles
Green (sustainable) Chemistry Principles*

Prevent waste

Maximize atom economy

Design less hazardous chemical syntheses

Design safer chemicals and products

Use safer solvents and reaction conditions

Increase energy efficiency

Use renewable feed stocks

Avoid chemical derivatives

Use catalysts, not stoichiometric reagents

Design chemicals and products that degrade after use

Analyze in real time to prevent pollution

Minimize the potential for accidents

* Anastas, P. T. and Warner, J. C. Green Chemistry: Theory and Practice,

Oxford University Press: New York, 1998.


Integrating Sustainable/Green Chemistry Methodology =

An ongoing, proactive engagement across the process/product life cycle

World Semiconductor Council

Influencing future legislation, regulations

Degree of influence


Sponsored Research,




Green Chemistry methodology

DfE (TD thru tech


Materials Risk


Concept development

Internal or external






HVM, Production

Process, Product


+15 yrs

2-3 yrs


4-6 yrs


No major changes to ESHtables/Potential Solutions

  • Potential changes being logged and will be updated in 2013

Discussion with key TWGs

  • ERM:
    • New insertion matrix table (detailed) for prioritization
    • GC WP for Winter Meeting to define methodology guidelines for TWGs
  • Factory Integration:
    • Joint inputs for new tool requirements
  • Metrology (new scope):
    • Drive advanced characterization for new materials, waste stream re-use/recycling
  • Lithography:
    • Driving resource conservation for EUV
  • FEP:
    • Wet cleans, maintenance, exhaust chemical impacts with III-V
  • Interconnect:
    • Focusing on process specific issues
  • Assembly & Packaging:
    • Evaluating ESH impacts for new packaging materials

2011 ITRS Factory Integration

goal for adopting green chemistry
Goal for adopting green chemistry

Ideally, green chemistry would provide a sustainable framework across our industry technology life cycle, maximizing the viability of the materials we use and ensuring that due diligence on ESH mitigation begins at the outset of chemical design

new materials challenges
New Materials Challenges
  • Introduction of new materials requires new process chemicals
    • New Deposition chemicals
    • Plasma etch chemistries
    • CMP Chemistries
    • Cleaning Chemicals
  • ESH Practices Needed for New Materials & Chemicals
  • Assessing Chemistries with “Green Chemistry” Methodology (appropriate to the relevant technical scope)