Microplasma Optical Emission Spectrometer (MOES) on a chip. SFR Workshop November 8, 2000 Michiel Krüger, David Hsu, Scott Eitapence, K. Poolla, C. Spanos, D. Graves, O. Solgaard Berkeley, CA.
November 8, 2000
Michiel Krüger, David Hsu, Scott Eitapence,
K. Poolla, C. Spanos, D. Graves, O. Solgaard
2001 GOAL: to build a microplasma generating system and test it with bulk optical components by 9/30/2001.
lensSchematic of initial MOES experimental configuration
fabricated in Si substrate
discharge is captured by
lens and collimated onto grating
focused on detector array to record spectrum
Silicon chip with 200mm hole and aluminum cathodeFirst experiments: plasma in 200mm hole, 100Torr N2 ambient
substrateCurrently fabricated in UCB Microlab
Build micro-optics for spectral analysis. Complete the preliminary designs for integrated MOES, by 9/30/2002.
Design and test integrated MOES. Calibration studies, sensor characterization, by 9/30/2003.