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Practical Implementation of Interface A on a Novellus Gamma 2130 photoresist strip tool

Practical Implementation of Interface A on a Novellus Gamma 2130 photoresist strip tool. Jaideep Jain Sr. Director, Software and Controls Engineering Novellus Systems, Inc. Russell Fleming Sr. Manager, Advanced Equipment and Process Control Novellus Systems, Inc . Dave Faulkner

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Practical Implementation of Interface A on a Novellus Gamma 2130 photoresist strip tool

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  1. Practical Implementation of Interface A on a Novellus Gamma 2130 photoresist strip tool • Jaideep Jain • Sr. Director, Software and Controls Engineering • Novellus Systems, Inc. • Russell Fleming • Sr. Manager, Advanced Equipment and Process Control • Novellus Systems, Inc. • Dave Faulkner • EVP, Sales and Marketing • Cimetrix, Inc. SEMICON Europa 2005 - Munich, Germany

  2. Agenda • Prototype Description • Gamma 2130 • System Overview • Lessons Learned • Conclusions SEMICON Europa 2005 - Munich, Germany

  3. Interface A Prototype Description • COMPLIANCE • Full Compliance with all Interface A / EDA standards • E-120, E120.1, E-125, E125.1, E-132, E132.1, E134, E-134.1 • PERFORMANCE • Performance optimized to exceed SEMI requirements • High speed DCIM (Data Collection Interface Module) • CONFIGURABILITY • Flexible, scalable Equipment Modeler & Runtime Engine • Flexible data input (including add-on sensors and other non-Windows platforms) • Unique solutions for security, buffering, and synchronization • Tools for design, deployment, roundtrip testing, configuration management and maintenance SEMICON Europa 2005 - Munich, Germany

  4. Gamma 2130Best of Breed for 300mm Strip A Robust, Production-Worthy 300mm Plasma Strip System • Highest productivity • >20% higher than the nearest competitor • Process flexibility • Wide array of strip applications • Demonstrated extendibility to 45nm • Production-proven reliability • >93% availability at multiple customers • Large installed base • PTOR at large logic, memory and foundry fabs • World wide support infrastructure SEMICON Europa 2005 - Munich, Germany

  5. CIMPortal System Architecture SEMICON Europa 2005 - Munich, Germany

  6. Interface A Prototype System Overview TCP/IP Data Collection Athena™ Server Novellus GUI Athena™ Knowledge Base Cimetrix FA S/W CIMPortal EDA Server E134 DCP Consumer Novellus Real Time Controller Equipment Control System Proprietary TCP/IP Connection E132, E125, E134 EDA Client Emulator CIMPortal Client Tools CIMPortal Administration Tools CIMPortal Database Client CIMPortal Text Client SEMICON Europa 2005 - Munich, Germany

  7. Data Collection Concept Fab Host Fab Host HSMS Interface A Host 1-n Multihost CIMPortal CIMConnect DCIM GEM Translation CIMConnect API CIM300 API Equipment Control System SEMICON Europa 2005 - Munich, Germany

  8. Lessons Learned • Integration difficulties with existing standards • E116 is difficult to map from GEM to E125 because of each EPT object having its own single event for the state machine • It would be nice to have SemiObjTypeInstance for SubstrateLocation, EPTTracker, and BatchLoc objects that are static objects. The type would include a ObjID for the static object and an SemiObjTypeRef to the SEMIObjType of the object • Data Collection Plans • Current restriction of attaching an event to a state machine could lead to the creation of many state machines or of not mapping events currently provided through GEM to E125 • UID for elements could hinder using "common components" for tools from the same vendor if not implemented correctly • Equipment suppliers and IC makers need to work together to decide on the type of data available for collection. Tool suppliers should provide tested built-in plans that balance data quality and tool performance while providing the most amount of data to the IC maker SEMICON Europa 2005 - Munich, Germany

  9. Lessons Learned • Security • Security for SSL is complex and difficult to use given the required human interaction to create and maintain certificates • E132 does not be define how to use SSL certificates (time, validation, etc.) • Certificate server implementation should use standards to prevent multiple implementation formats • Performance • Size of E125 metadata structure response can be enormous (1-n MB, 3 times size of model XML file) so this should be done sparingly • 1,600 parameters on this tool equates to over 26,000 lines (1.3 MB) of XML in the model. Care must be taken to ensure that the models are accurate and up to date • IC makers should work with the equipment suppliers to determine poll rates that are not faster than the tool’s control system can supply fresh data • Tool design should provide capabilities to buffer or throttle data such that over sampling of data does not overwhelm the tool and affect tool performance • Data gathering technique has a larger impact on performance than data serialization SEMICON Europa 2005 - Munich, Germany

  10. Conclusions • Novellus & Cimetrix successfully demonstrated a fully working EDA interface • Performance was not a problem with single or two clients • Tested at 1Hz and 10Hz with one and two clients • 1000 VIDs at 1Hz or 100 VIDs at 10Hz showed minimal CPU usage • No major issues with the EDA standards were identified • Many good suggestions were identified and given to ISMI • Novellus plans for Interface A deployment during 2005 SEMICON Europa 2005 - Munich, Germany

  11. Thank you! SEMICON Europa 2005 - Munich, Germany

  12. E132 Standards Compliance • Section # Feature Description Implemented in Prototype • E132 - Equipment Client Authentication and Authorization • 10 Authentication services Y • 11 Authorization services Y • 11.2 Access control via Access Control List (ACL) Y • 11.2.9 Role-based authorization Y • 11.2.10 Authorization privileges Y • 12.3.2 Security administration operations Y • 12.3.2.1 GetDefinedPrivileges Y • 12.3.2.2 GetACL Y • 12.3.2.3 AddACLEntry Y • 12.3.2.4 DeleteACLEntry Y • 12.3.2.5 GetActiveSessions Y • 12.3.2.6 SetMaxSessions Y • 12.3.2.7 GetMaxSessions Y • 12.4 Equipment console administration interface Y • 13.2 Authenticated session management Y • 13.2.3 PersistSession Y • 13.2.4 SessionPing Y • 13.2.5 CloseSession Y • 13.2.6 EstablishSession Y • 14 All communication and authenticated session state models Y • 15 Client InterfaceY • 15.1.1 SessionPing Y • 15.1.2 SessionFrozen Y • 15.1.3 SessionClosed Y SEMICON Europa 2005 - Munich, Germany

  13. E134 Standards Compliance • Section # Feature Description Implemented in Prototype • E134 - Data Collection Management • 9Data Collection Management Interface Y • 9.1.2.2 DefinePlan Y • 9.1.2.3 GetDefinedPlanIds Y • 9.1.2.4 GetPlanDefinition Y • 9.1.2.5 ActivatePlan Y • 9.1.2.6 GetActivePlanIds Y • 9.1.2.7 DeactivatePlan Y • 9.1.2.8 DeletePlan Y • 9.1.2.9 GetParameterValues Y • 9.1.2.10 GetObjTypeInstanceIds N • 9.1.2.11 GetCurrentPerformanceStatus Y • 10 Data Collection Plan Privileges Y • 11 Data Collection Plan Definition Y • 11.1.2.2 intervalInMinutes (i.e., buffering) Y • 11.1.2.2 isPersistent Y • 11.1.3 EventRequest Y • 11.1.4 ExceptionRequest Y • 11.1.5 TraceRequest Y • 11.1.5.1 collectionCount Y • 11.1.5.1 groupSize Y • 11.1.5.1 isCyclical Y • 11.1.5.5 startOn Triggers Y • 11.1.5.5 stopOn Triggers Y • 12 Data Collection Plan State Models Y • 13 Operational Performance Monitoring Y • 14 Data Representation Y • 14.1.3 Event Report Y • 14.1.4 Exception Report Y • 14.1.5 Trace Report Y • 15 Data Collection Plan Notifications Y • 15.1.4 NewData Y • 15.1.5 PerformanceWarning Y • 15.1.6 PerformanceRestored Y • 15.1.7 DCPDeactivation Y • 15.1.8 DCPHibernation Y SEMICON Europa 2005 - Munich, Germany

  14. E125 Standards Compliance • Section # Feature Description Implemented in Prototype • E125 - Equipment Self Description (ESD) • 9.1 Metadata Access Y • 9.1 EquipmentMetadataManager Y • 9.1.2.1 GetUnits Y • 9.1.2.2 GetTypeDefinitions Y • 9.1.2.3 GetStateMachines Y • 9.1.2.4 GetSEMIObjTypes Y • 9.1.2.5 GetExceptions Y • 9.1.2.6 GetEquipmentStructure Y • 9.1.2.7 GetEquipmentNodeDescription Y • 9.1.2.9 GetLatestRevision Y • 9.1.2.10 NotifyOnRevisions Y • 9.2 MetadataClient Y • 9.2.2.1 MetadataRevised Y • 10.1 Management of Equipment Metadata Y • 10.2 Equipment Physical Structure as defined by E120 / E120.1Y • 10.3 Equipment Node Description Y • 10.4 Parameters Y • 10.5 Types Y • 10.6 Units Y • 10.7 Exceptions Y • 10.8 State Machines Y • 10.9 ObjTypes Y SEMICON Europa 2005 - Munich, Germany

  15. E125 & 300mm Standards Compliance • Section # Feature Description Implemented in Prototype • E120 – Common Equipment Model • 7.3 CEM object definitions made available electronically to the factory host Y • 8.5.4.1 Equipment Class Y • 8.5.4.2 Module Class Y • 8.5.4.3 Subsystem Class Y • 8.5.4.4 IODevice Class Y • 8.5.4.5 Material Location Class Y • Standard Implemented in Prototype • E37 High-Speed SECS Message Services (HSMS) Y • E40 Standard for Processing ManagementY • E84 Specification for Enhanced Carrier HandoffY • E87 Specification for Carrier ManagementY • E90 Specification for Substrate TrackingY • E94 Provisional Specification for Control Job Management Y SEMICON Europa 2005 - Munich, Germany

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