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SWS2171

SWS2171. Double wedge 2011-02-28. Measured samples. a3. Yes. yes. Yes. b3. c3. Annealing Direction. d1. d2. d4. d3. e3. f3. Yes. Yes. Yes. g3. h3. Only chips labeled “Yes” were exposed in the e-beam tool. Unshaded

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SWS2171

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  1. SWS2171 Double wedge 2011-02-28

  2. Measured samples a3 Yes yes Yes b3 c3 Annealing Direction d1 d2 d4 d3 e3 f3 Yes Yes Yes g3 h3 Only chips labeled “Yes” were exposed in the e-beam tool. Unshaded chips should all be open devices, i.e. nearly infinite resistance.

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