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Vežba 10 – Ispitivanje jonima

Inženjerstvo površina. Vežba 10 – Ispitivanje jonima. A leksandar Miletić Fakultet tehničkih nauka. SIMS. Izuzetna osetljivost. Najosetljivija tehnika za analizu tankih površinskih slojeva. Manja prostorna rezolucija. SIMS. Površinska spektroskopija

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Vežba 10 – Ispitivanje jonima

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  1. Inženjerstvo površina Vežba 10 – Ispitivanje jonima AleksandarMiletić Fakultet tehničkih nauka

  2. SIMS • Izuzetna osetljivost. • Najosetljivija tehnika za analizu tankih površinskih slojeva. • Manja prostorna rezolucija.

  3. SIMS • Površinska spektroskopija • Informacije o elementima i molekulima • Neograničen maseni opseg • Osetljivost u ppm • Masena rezolucija > 10000 (M/dm) • Elementarno mapiranje • Prostorna rezolucija < 100 nm • Paralelna masena detekcija • Dubinsko profilisanje • Dubinska rezolucija < 1 nm • Tanki slojevi od 1 nm do > 10 um • Analiza izolatora

  4. TOF SIMS

  5. TOF SIMS

  6. TOF SIMS

  7. TOF SIMS – Režimi rada • Statički SIMS • Elementarna analiza veoma tankih površinskih slojeva • Dinamički SIMS • Hemijski sastav po dubini • Mapirajući SIMS • Prostorna raspodela elemenata

  8. TOF SIMS High performance research TOF-SIMS system http://www.kore.co.uk/1094.htm 21.01.2014.

  9. TOF SIMS The SurfaceSeer: Surface Analysis by TOF-SIMS http://www.kore.co.uk/surfaceseer.htm 21.01.2014.

  10. TOF SIMS

  11. TOF SIMS

  12. TOF SIMS Positive ion images of friction surfaces of three types of test blocks tested in engine oil [B]: field of view is 200 μm2.

  13. GDOES

  14. GDOES http://www.horiba.com

  15. GDOES

  16. SIMS vs. GDOES

  17. RBS

  18. RBS • Dubinsko profilisanje većeg broja elemenata • Opseg od 0 do 1 mm • Dubinska rezolucija oko 2 nm • Prostorna rezolucija 0.5 do 2.0 mm • Brza tehnika ispitivanja, bez razaranja • Hemijske veze ne utiču na rezultat analize • Kvantitativna tehnika ispitivanja • Visoka preciznost (± 1%) • Visoka osetljivost koja zavisi od mase (Z)

  19. RBS

  20. RBS

  21. Hvala na pažnji! • Inženjerstvo površina

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