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Modular Cleanrooms, Inc. - PowerPoint PPT Presentation


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Modular Cleanrooms, Inc. Silicon wafer fabrication. Taken from www.egg.or.jp/MSIL/english/index-e.html. Silicon wafer fabrication – slicing and polishing. Taken from www.egg.or.jp/MSIL/english/index-e.html. LPCVD Systems. IBM 7-Level Cu Metallization. What is a Microswitch?.

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Presentation Transcript
silicon wafer fabrication
Silicon wafer fabrication
  • Taken from www.egg.or.jp/MSIL/english/index-e.html
silicon wafer fabrication slicing and polishing
Silicon wafer fabrication – slicing and polishing
  • Taken from www.egg.or.jp/MSIL/english/index-e.html
what is a microswitch
What is a Microswitch?

Surface Micromachined

5-500 Micron Size

5-300 V Actuation

mems gyroscope chip

1mm Drive

0.01Å Sense

MEMS Gyroscope Chip

J. Seeger, X. Jiang, and B. Boser

slide29

Single chip six-degree-of-freedom inertial

measurement unit (uIMU) designed by IMI

principals and fabricated by Sandia National Laboratories

micromachining ink jet nozzles
Micromachining Ink Jet Nozzles

Microtechnology group, TU Berlin