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Development of an Automatic Alignment System for Diffraction Phase Microscopy in Wafer Inspection

This project focuses on creating a motion-controlled stage to enhance the precision and stability of a diffraction phase microscope. By aligning a small pinhole in its Fourier plane, I aim to develop an automatic alignment system along with the corresponding control code. This advancement will significantly reduce the time researchers spend on manual alignment processes, thereby improving efficiency in wafer defect inspections. The work will be integrated into a larger setup, ultimately contributing to more stable microscopy operations.

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Development of an Automatic Alignment System for Diffraction Phase Microscopy in Wafer Inspection

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  1. Automatic alignment of a diffraction phase microscope for wafer defect inspection Graduate mentor: Renjie Zhou Faculty mentor: Lynford Goddard By: Melissa Crawford (undergraduate student)

  2. Project Summary The project involve creating a motion controlled stage that is a double to part of a setup in another lab. On this setup I am working to precisely place a very small pinhole in the Fourier plane of a diffraction phase microscope. On this setup I am trying to create an automatic alignment system and the control code to go along with it. When I am done with my part of the project, it has to be transferred to the overall setup. My work is to help improve the stability of this microscope tool and save a lot of time that investigators currently spend on performing alignment.

  3. Safety • 1. General Lab Safety: http://www.drs.illinois.edu/training/index.aspx • 2. Laser Safety: http://www.drs.illinois.edu/training/index.aspx • 3. Electrical Safety: http://www.drs.illinois.edu/training/index.aspx4. Attached safety documents  Paper • Optically monitoring and controlling nanoscale topography during semiconductor etching --http://www.nature.com/lsa/journal/v1/n9/pdf/lsa201230a.pdf Additional information • Product manuals • http://www.thorlabs.com/catalogpages/V21/609.PDF • http://www.thorlabs.com/Thorcat/11800/ZST25B-Manual.pdf • http://www.thorlabs.com/catalogpages/V21/256.PDF • http://www.thorlabs.com/Thorcat/15700/TST001-Manual.pdf • http://www.thorlabs.com/catalogpages/V21/621.PDF • http://www.thorlabs.com/Thorcat/15800/TCH002-Manual.pdf • Fourier Transforms • http://www.youtube.com/watch?v=gZNm7L96pfY • General Optics • http://spie.org/Documents/Publications/00%20STEP%20Module%2003.pdf • Coding • Matlab • Laview

  4. Tasks • 2/25/13 Build basic assembly for holding pinhole filter • 3/5/13 Create and initial alignment system to get close • 3/19/13 Alignment system to finely adjust system to optimal location • 4/1/13 Transition system to Beckman • 4/10/13 Summarize results

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