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Automatic alignment of a diffraction phase microscope for wafer defect inspection

Automatic alignment of a diffraction phase microscope for wafer defect inspection. Graduate mentor: Renjie Zhou Faculty mentor: Lynford Goddard By: Melissa Crawford (undergraduate student). Project Summary.

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Automatic alignment of a diffraction phase microscope for wafer defect inspection

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  1. Automatic alignment of a diffraction phase microscope for wafer defect inspection Graduate mentor: Renjie Zhou Faculty mentor: Lynford Goddard By: Melissa Crawford (undergraduate student)

  2. Project Summary The project involve creating a motion controlled stage that is a double to part of a setup in another lab. On this setup I am working to precisely place a very small pinhole in the Fourier plane of a diffraction phase microscope. On this setup I am trying to create an automatic alignment system and the control code to go along with it. When I am done with my part of the project, it has to be transferred to the overall setup. My work is to help improve the stability of this microscope tool and save a lot of time that investigators currently spend on performing alignment.

  3. Safety • 1. General Lab Safety: http://www.drs.illinois.edu/training/index.aspx • 2. Laser Safety: http://www.drs.illinois.edu/training/index.aspx • 3. Electrical Safety: http://www.drs.illinois.edu/training/index.aspx4. Attached safety documents  Paper • Optically monitoring and controlling nanoscale topography during semiconductor etching --http://www.nature.com/lsa/journal/v1/n9/pdf/lsa201230a.pdf Additional information • Product manuals • http://www.thorlabs.com/catalogpages/V21/609.PDF • http://www.thorlabs.com/Thorcat/11800/ZST25B-Manual.pdf • http://www.thorlabs.com/catalogpages/V21/256.PDF • http://www.thorlabs.com/Thorcat/15700/TST001-Manual.pdf • http://www.thorlabs.com/catalogpages/V21/621.PDF • http://www.thorlabs.com/Thorcat/15800/TCH002-Manual.pdf • Fourier Transforms • http://www.youtube.com/watch?v=gZNm7L96pfY • General Optics • http://spie.org/Documents/Publications/00%20STEP%20Module%2003.pdf • Coding • Matlab • Laview

  4. Tasks • 2/25/13 Build basic assembly for holding pinhole filter • 3/5/13 Create and initial alignment system to get close • 3/19/13 Alignment system to finely adjust system to optimal location • 4/1/13 Transition system to Beckman • 4/10/13 Summarize results

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