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Automatic alignment of a diffraction phase microscope for wafer defect inspection. Graduate mentor: Renjie Zhou Faculty mentor: Lynford Goddard By: Melissa Crawford (undergraduate student). Project Summary.

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automatic alignment of a diffraction phase microscope for wafer defect inspection

Automatic alignment of a diffraction phase microscope for wafer defect inspection

Graduate mentor: Renjie Zhou

Faculty mentor: Lynford Goddard

By: Melissa Crawford

(undergraduate student)

slide2

Project Summary

The project involve creating a motion controlled stage that is a double to part of a setup in another lab. On this setup I am working to precisely place a very small pinhole in the Fourier plane of a diffraction phase microscope. On this setup I am trying to create an automatic alignment system and the control code to go along with it. When I am done with my part of the project, it has to be transferred to the overall setup. My work is to help improve the stability of this microscope tool and save a lot of time that investigators currently spend on performing alignment.

slide3

Safety

  • 1. General Lab Safety: http://www.drs.illinois.edu/training/index.aspx
  • 2. Laser Safety: http://www.drs.illinois.edu/training/index.aspx
  • 3. Electrical Safety: http://www.drs.illinois.edu/training/index.aspx4. Attached safety documents 

Paper

  • Optically monitoring and controlling nanoscale topography during semiconductor etching --http://www.nature.com/lsa/journal/v1/n9/pdf/lsa201230a.pdf

Additional information

  • Product manuals
    • http://www.thorlabs.com/catalogpages/V21/609.PDF
    • http://www.thorlabs.com/Thorcat/11800/ZST25B-Manual.pdf
    • http://www.thorlabs.com/catalogpages/V21/256.PDF
    • http://www.thorlabs.com/Thorcat/15700/TST001-Manual.pdf
    • http://www.thorlabs.com/catalogpages/V21/621.PDF
    • http://www.thorlabs.com/Thorcat/15800/TCH002-Manual.pdf
  • Fourier Transforms
    • http://www.youtube.com/watch?v=gZNm7L96pfY
  • General Optics
    • http://spie.org/Documents/Publications/00%20STEP%20Module%2003.pdf
  • Coding
    • Matlab
    • Laview
tasks
Tasks
  • 2/25/13 Build basic assembly for holding pinhole filter
  • 3/5/13 Create and initial alignment system to get close
  • 3/19/13 Alignment system to finely adjust system to optimal location
  • 4/1/13 Transition system to Beckman
  • 4/10/13 Summarize results